共 31 条
[3]
A novel long-travel piezoelectric-driven linear nanopositioning stage
[J].
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY,
2006, 30 (01)
:85-95
[5]
Flexural-hinge guided motion nanopositioner stage for precision machining: finite element simulations
[J].
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY,
2001, 25 (01)
:77-81
[8]
Howell L.L., 2001, COMPLIANT MECH
[10]
A novel 5DOF thin coplanar nanometer-scale stage
[J].
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY,
2008, 32 (04)
:239-250