Modeling and analysis of a new flexure-based micropositioner for precision manipulation

被引:0
作者
Zubir, Mohd Nashrul Mohd [1 ]
Shirinzadeh, Bijan [2 ]
Tian, Yanling [2 ]
机构
[1] Univ Malaya, Kuala Lumpur, Malaysia
[2] Monash Univ, Dept Mech Engn, Robot & Mechatron Res Lab, Clayton, Vic 3800, Australia
来源
2009 IEEE/ASME INTERNATIONAL CONFERENCE ON ADVANCED INTELLIGENT MECHATRONICS, VOLS 1-3 | 2009年
基金
澳大利亚研究理事会;
关键词
MOTION TRACKING CONTROL; MICRO/NANO-MANIPULATION; PIEZOELECTRIC ACTUATORS; NANOPOSITIONING STAGE; MECHANISM; DESIGN; DRIVEN; MICROGRIPPER; KINEMATICS; SYSTEMS;
D O I
暂无
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
This paper focuses on the development of a new high precision micropositioning device that is capable of traveling in translational and rotational motions. The device was modeled via the application of flexural cantilever structure to harness the precision and accuracy in implementing the positioning routine. This attribute is paramount to enable further manipulation procedures such as grasping, injecting, mounting, assembly and machining to be performed. A new hinge configuration was specifically designed to provide the micropositioner platform with 3-degree of freedom motion capability (x-y-theta). Furthermore, a new approach in delivering the actuated motion has been devised via the utilization of slander beam profile acting in pressing mode which is critical in improving the performance of the device particularly in extending its capability to operate within high frequency range. The modeling procedure was realized via the combination of Pseudo Rigid Body Model (PRBM) and Finite Element Analysis (FEA). Analysis was performed within simulation environment to observe and verify the performance of the proposed model under various modes of motions. The analyses authenticate the capacity of the micropositioner to demonstrate high accuracy and fidelity motion.
引用
收藏
页码:82 / +
页数:2
相关论文
共 31 条
[1]   Optimal design of a compliant mechanism with circular notch flexure hinges [J].
Choi, K-B ;
Han, C. S. .
PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART C-JOURNAL OF MECHANICAL ENGINEERING SCIENCE, 2007, 221 (03) :385-392
[2]   Kinematic design of large displacement precision XY positioning stage by using cross strip flexure joints and over-constrained mechanism [J].
Choi, Yeong-jun ;
Sreenivasan, S. V. ;
Choi, Byung Jin .
MECHANISM AND MACHINE THEORY, 2008, 43 (06) :724-737
[3]   A novel long-travel piezoelectric-driven linear nanopositioning stage [J].
Chu, CL ;
Fan, SH .
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2006, 30 (01) :85-95
[4]   Design of a precision compliant parallel positioner driven by dual piezoelectric actuators [J].
Dong, W. ;
Sun, L. N. ;
Du, Z. J. .
SENSORS AND ACTUATORS A-PHYSICAL, 2007, 135 (01) :250-256
[5]   Flexural-hinge guided motion nanopositioner stage for precision machining: finite element simulations [J].
Elmustafa, AA ;
Lagally, MG .
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2001, 25 (01) :77-81
[6]   Tactile microgripper for automated handling of microparts [J].
Greitmann, G ;
Buser, RA .
SENSORS AND ACTUATORS A-PHYSICAL, 1996, 53 (1-3) :410-415
[7]   Nanoscale positioning for magnetic recording [J].
He, LN ;
Wang, FZG ;
Mapps, DJ ;
Robinson, P ;
Jenkins, D ;
Clegg, WW .
SENSORS AND ACTUATORS A-PHYSICAL, 2000, 81 (1-3) :313-316
[8]  
Howell L.L., 2001, COMPLIANT MECH
[9]   A platform for micropositioning based on piezo legs [J].
Juhas, L ;
Vujanic, A ;
Adamovic, N ;
Nagy, L ;
Borovac, B .
MECHATRONICS, 2001, 11 (07) :869-897
[10]   A novel 5DOF thin coplanar nanometer-scale stage [J].
Jywe, Wen-Yuh ;
Jeng, Yeau-Ren ;
Liu, Chien-Hung ;
Teng, Yun-Feng ;
Wu, Chia-Hung ;
Wang, Hung-Shu ;
Chen, Yi-Jou .
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2008, 32 (04) :239-250