Combined ellipsometry and X-ray related techniques for studies of ultrathin organic nanocomposite films

被引:3
|
作者
Kraemer, Markus [1 ,2 ]
Roodenko, Katy [3 ,4 ]
Pollakowski, Beatrix [5 ]
Hinrichs, Karsten [3 ]
Rappich, Joerg [6 ]
Esser, Norbert [3 ]
von Bohlen, Alex [1 ]
Hergenroeder, Roland [1 ]
机构
[1] Leibniz Inst Analyt Wissensch ISAS eV, D-44139 Dortmund, Germany
[2] AXO DRESDEN GmbH, D-01809 Heidenau, Germany
[3] Leibniz Inst Analyt Wissensch ISAS eV, Dept Berlin, D-12489 Berlin, Germany
[4] Univ Texas Dallas, NSERL, Lab Surface & nanostruct Modificat, Richardson, TX 75080 USA
[5] Phys Tech Bundesanstalt, D-10587 Berlin, Germany
[6] Helmholtz Zentrum Berlin Mat & Energie GmbH, D-12489 Berlin, Germany
关键词
Optical simulations; Infrared spectroscopic ellipsometry; Synchrotron; X-ray standing waves; Surface modification; INFRARED SPECTROSCOPIC ELLIPSOMETRY; MONOCHROMATOR BEAMLINE; FLUORESCENCE ANALYSIS; SI SURFACES; BESSY-II; LAYERS; REFLECTIVITY; OXIDATION; SILICON; REDUCTION;
D O I
10.1016/j.tsf.2010.04.033
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Ultrathin nanocomposite films of nitrobenzene on silicon were analyzed by Infrared Spectroscopic Ellipsometry (IRSE), X-ray reflectivity (XRR) and X-ray standing waves (XSW) before and after evaporation of gold. Infrared Spectroscopic Ellipsometry measurements were performed for identification of adsorbates and for investigation of the molecular orientation. Results for film thickness were correlated with XRR measurements. Further, XSW measurements of elements incorporated in nitrobenzene (C, N, and O) were performed with soft X-rays. The combination of the different methods allowed to confirm a model for the electrochemically deposited nitrobenzene films before and after gold evaporation. The characterization by XRR and XSW scans using hard X-rays showed that gold had penetrated into the nitrobenzene film and thus changed density and optical properties of this layer significantly. A depth profile correlated to the electron density is deduced from the XRR measurements. This profile allows to localize in vertical direction gold islands within the composite film. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码:5509 / 5514
页数:6
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