Control of an Air Spring Type Anti-Vibration Apparatus with an Inverse Function for Shape of Pressure Frequency Characteristic

被引:0
作者
Wang, Ziyue [1 ]
Wakui, Shinji [2 ]
Nakamura, Yukinori [2 ]
机构
[1] Tokyo Univ Agr & Technol, Grad Sch Engn, 2-24-16 Naka Cho, Koganei, Toyko 1848588, Japan
[2] Tokyo Univ Agr & Technol, Inst Engn, Koganei, Toyko 1848588, Japan
来源
2015 IEEE INTERNATIONAL CONFERENCE ON INDUSTRIAL TECHNOLOGY (ICIT) | 2015年
关键词
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
An air-type anti-vibration apparatus is widely used in the field of precision positioning and measurement. Due to the characteristics of the air spring, a pair of anti-resonance and resonance occurs in the pressure control system. In order to avoid the performance degradation of the vibration control, we eliminate the anti-resonance and resonance by designing the control scheme with an inverse function.
引用
收藏
页码:155 / 160
页数:6
相关论文
共 11 条
[1]  
Aizaki H., 2011, T JAPAN SOC MECH E C, V77, P309
[2]  
Canon, 2000, United States Patent, Patent No. 6021991
[3]  
Canon, 1997, United States Patent, Patent No. 5610686
[4]  
Irie Ryo, 2008, Journal of the Japan Society of Precision Engineering, V74, P1002, DOI 10.2493/jjspe.74.1002
[5]   Active control of a pneumatic isolation table using model following control and a pressure differentiator [J].
Kato, Tomonori ;
Kawashima, Kenji ;
Sawamoto, Koichi ;
Kagawa, Toshiharu .
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2007, 31 (03) :269-275
[6]  
Ronte T., 2013, P 39 ANN C IEEE IND, P386
[7]  
Ronte T., 2013, T JAPAN SOC MECH E C, V77, P276
[8]  
Wakui S, 1999, INT J JPN S PREC ENG, V33, P251
[9]   Incline compensation control using an air-spring type active isolated apparatus [J].
Wakui, S .
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2003, 27 (02) :170-174
[10]  
Wakui S., 2006, T JAPAN SOC MECH ENG, V72, P215