Humidity sensing properties of La3+/Ce3+-doped TiO2-20 wt.% SnO2 thin films derived from sol-gel method

被引:18
作者
Li Hongxia [1 ]
Shi Zhiming [1 ,2 ]
Liu Hongwei [1 ]
机构
[1] Inner Mongolia Univ Technol, Sch Mat Sci & Engn, Hohhot 010051, Peoples R China
[2] Inner Mongolia Res Ctr Adv Mat Engn & Technol, Hohhot 010051, Peoples R China
关键词
humidity sensing; titania; thin film; rare earths; PHASE-TRANSFORMATION; SENSITIVITY; BEHAVIORS; ATMOSPHERE; SENSORS;
D O I
10.1016/S1002-0721(09)60064-8
中图分类号
O69 [应用化学];
学科分类号
081704 ;
摘要
The humidity sensing properties of La3+/Ce3+-doped TiO2-20 wt.%SnO2 thin films were studied. Sol-gel method was employed to prepare the films on alumina substrates. By constructing a humidity-impedance measuring system, the sensing behaviors were inspected for the films sintered at different temperatures. Experimental results showed that, 0.5 wt.% of La2O3 or Ce2O3 doped films sintered at 500 degrees C for 2 h had the best humidity sensing properties, the impedance decreasing from 10(9) Omega to below 10(4) Omega in the humidity range of 15-95 RH%. Moreover. Ce3+-doping had better humidity sensing properties than La3+-doping. The doping mechanism was discussed in terms of phase composition, granularity of crystalline and segregation of rare earth ions at grain boundaries.
引用
收藏
页码:123 / 127
页数:5
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