Germanium-On-Insulator (GeOI) structures realized by the Smart Cut™ technology

被引：18

作者：

Deguet, C ^{[1
]}

Morales, C ^{[1
]}

Dechamp, J ^{[1
]}

Hartmann, JM ^{[1
]}

Charvet, AM ^{[1
]}

Moriceau, H ^{[1
]}

Chieux, F ^{[1
]}

Beaumont, A ^{[1
]}

Clavelier, L ^{[1
]}

Loup, V ^{[1
]}

Kernevez, N ^{[1
]}

Raskin, G ^{[1
]}

Richtarch, C ^{[1
]}

Allibert, F ^{[1
]}

Letertre, F ^{[1
]}

Mazure, C ^{[1
]}

机构：

[1] CEA DRT LETI CEA GRE, F-38054 Grenoble 9, France

来源：

2004 IEEE INTERNATIONAL SOI CONFERENCE, PROCEEDINGS | 2004年

关键词：

D O I：

10.1109/SOI.2004.1391571

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：96 / 97

页数：2

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