An analysis of Ag/Al2O3 angular selective films by x-ray reflectivity

被引:3
作者
Dligatch, S [1 ]
Cheary, RW [1 ]
Smith, GB [1 ]
机构
[1] Univ Technol Sydney, Dept Appl Phys, Sydney, NSW 2007, Australia
关键词
X-ray; deposition process; coatings;
D O I
10.1016/S0040-6090(97)00334-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
X-ray reflectivity measurements using a conventional X-ray diffractometer have been carried out on Ag/Al2O3 films prepared by simultaneous bi-oblique deposition of Ag and Al2O3. The results show that this technique is a sensitive way of identifying the presence of a discontinuous 1 nm Ag layer on the surface of the Ag/Al2O3 composite film. (C) 1998 Elsevier Science S.A.
引用
收藏
页码:4 / 6
页数:3
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