Electron beam excitation assisted optical microscope with ultra-high resolution

被引：45

作者：

Inami, Wataru ^{[2
]}

Nakajima, Kentaro ^{[1
]}

Miyakawa, Atsuo ^{[1
,2
]}

Kawata, Yoshimasa ^{[1
,2
]}

机构：

[1] Shizuoka Univ, Fac Engn, Johoku, Hamamatsu, Shizuoka 4328561, Japan

[2] Japan Sci & Technol Agcy, CREST, Tokyo, Japan

来源：

OPTICS EXPRESS | 2010年 / 18卷 / 12期

基金：

日本科学技术振兴机构;

关键词：

SAMPLE DISTANCE CONTROL; SHEAR-FORCE; FIELD; SYSTEM; PROBE; TIP; SPECTROSCOPY; FABRICATION; ALIGNMENT; REGION;

D O I：

10.1364/OE.18.012897

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We propose electron beam excitation assisted optical microscope, and demonstrated its resolution higher than 50 nm. In the microscope, a light source in a few nanometers size is excited by focused electron beam in a luminescent film. The microscope makes it possible to observe dynamic behavior of living biological specimens in various surroundings, such as air or liquids. Scan speed of the nanometric light source is faster than that in conventional near-field scanning optical microscopes. The microscope enables to observe optical constants such as absorption, refractive index, polarization, and their dynamic behavior on a nanometric scale. The microscope opens new microscopy applications in nano-technology and nano-science. (C) 2010 Optical Society of America

引用

页码：12897 / 12902

页数：6

共 28 条

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