Evaluation of batching strategies in a multi-product waferfab by discrete-event simulation

被引：0

作者：

Habenicht, I ^{[1
]}

Mönch, L ^{[1
]}

机构：

[1] Tech Univ Ilmenau, Inst Informat Syst, D-98694 Ilmenau, Germany

来源：

SIMULATION IN INDUSTRY | 2004年

关键词：

semiconductor manufacturing; batching; discrete-event simulation; performance assessment;

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

In this paper, we present the results of a simulation study for the performance evaluation of certain batching strategies in a multi-product semiconductor wafer fabrication facility (waferfab). Batching in waferfabs means that we can process different lots at the same time on the same machine. As opposite to common scheduling and dispatching decisions in manufacturing beside assignment and sequencing decisions we have to make decisions on the content of a batch. Batching decisions have a large impact on the performance of a waferfab because of very long processing times. In this simulation study, we extend previous work on the evaluation of batching strategies from the two product-case to the case of a larger number of products and different pro duct mix scenarios.

引用

页码：23 / 28

页数：6

共 11 条

[1]

Akçali E, 2000, PROCEEDINGS OF THE 2000 WINTER SIMULATION CONFERENCE, VOLS 1 AND 2, P1428, DOI 10.1109/WSC.2000.899121

[2]

[Anonymous], WAFER FABRICATION FA

[3]

[Anonymous], MANAGE SCI

[4]

Fowler J. W., 1995, Rep. 95062861A-TR

[5]

Habenicht I, 2002, PROCEEDINGS OF THE 2002 WINTER SIMULATION CONFERENCE, VOLS 1 AND 2, P1406, DOI 10.1109/WSC.2002.1166411

[6] A modified shifting bottleneck heuristic for minimizing total weighted tardiness in complex job shops [J].

Mason, SJ ;

Fowler, JW ;

Carlyle, WM .

JOURNAL OF SCHEDULING, 2002, 5 (03) :247-262

[7] Simulation-based assessment of batching heuristics in semiconductor manufacturing [J].

Mönch, L ;

Habenicht, I .

PROCEEDINGS OF THE 2003 WINTER SIMULATION CONFERENCE, VOLS 1 AND 2, 2003, :1338-1345

[8]

MONCH L, 2002, P 2002 MOD AN SEM MA, P95

[9]

SCHOMIG A, 2000, P 9 ASIM DED C SIM P, P55

[10] A REVIEW OF PRODUCTION PLANNING AND SCHEDULING MODELS IN THE SEMICONDUCTOR INDUSTRY PART I: SYSTEM CHARACTERISTICS, PERFORMANCE EVALUATION AND PRODUCTION PLANNING [J].

UZSOY, R ;

LEE, CY ;

MARTINVEGA, LA .

IIE TRANSACTIONS, 1992, 24 (04) :47-60

← 1 2 →