Overview on fabrication of three-dimensional structures in multi-layer ceramic substrate

被引：80

作者：

Khoong, L. E. ^{[1
]}

Tan, Y. M.

Lam, Y. C. ^{[2
]}

机构：

[1] Singapore Inst Mfg Technol, Machining Technol Grp, Singapore 638075, Singapore

[2] Nanyang Technol Univ, Singapore 639798, Singapore

来源：

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY | 2010年 / 30卷 / 10期

关键词：

Sintering; Substrate; Lamination; Patterning; LTCC; EMBEDDED STRUCTURES; PATCH ANTENNAS; GREEN TAPES; LTCC; LAMINATION; CAVITIES; LAYER;

D O I：

10.1016/j.jeurceramsoc.2010.03.011

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Three-dimensional structures in a multi-layer ceramic substrate are important in realizing ceramic-based meso- and micro-systems. During lamination and/or co-firing, three-dimensional structures, especially those with suspended structures, tend to deform and sag due to the intrinsic nature of the green (un-fired) ceramic material. Fabrication of three-dimensional structures with well-controlled dimensional stability and mechanical integrity remains a challenge. This paper discusses the challenges in fabricating structures in a multi-layer ceramic substrate. An overview is provided of the current state of the art in patterning and lamination techniques for the fabrication of these three-dimensional structures. (c) 2010 Elsevier Ltd. All rights reserved.

引用

页码：1973 / 1987

页数：15

共 58 条

[1]

ALEXANDER JH, 1997, Patent No. 5601673

[2] Aspects of micro structuring low temperature co-fired ceramic (LTCC) for realisation complex 3D objects by embossing [J].

Andrijasevic, Daniela ;

Smetana, Walter ;

Zehetner, Johann ;

Zoppel, Sandra ;

Brenner, Werner .

MICROELECTRONIC ENGINEERING, 2007, 84 (5-8) :1198-1201

[3] Fabrication of Precise Fluidic Structures in LTCC [J].

Barlow, Fred ;

Wood, Jared ;

Elshabini, Aicha ;

Stephens, Edward F. ;

Feeler, Ryan ;

Kemner, Greg ;

Junghans, Jeremy .

INTERNATIONAL JOURNAL OF APPLIED CERAMIC TECHNOLOGY, 2009, 6 (01) :18-23

[4]

Bau H., 1988, Proceedings of the ASME InternationalMechanical Engineering Congress and Exposition, P491

[5]

BAUER R, 1997, 30 INT S MICR ISHM 9, P659

[6]

BERRY CW, 2007, Patent No. 7240424

[7] Application of graphite-based sacrificial layers for fabrication of LTCC (low temperature co-fired ceramic) membranes and micro-channels [J].

Birol, H. ;

Maeder, T. ;

Ryser, P. .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2007, 17 (01) :50-60

[8] Fabrication of low-temperature co-fired ceramics micro-fluidic devices using sacrificial carbon layers [J].

Birol, H ;

Maeder, T ;

Jacq, C ;

Straessler, S ;

Ryser, P .

INTERNATIONAL JOURNAL OF APPLIED CERAMIC TECHNOLOGY, 2005, 2 (05) :364-373

[9] Processing of graphite-based sacrificial layer for microfabrication of low temperature co-fired ceramics (LTCC) [J].

Birol, Hansu ;

Maeder, Thomas ;

Ryser, Peter .

SENSORS AND ACTUATORS A-PHYSICAL, 2006, 130 :560-567

[10]

BURDON JW, 2003, Patent No. 6592696

← 1 2 3 4 5 6 →