Fundamental characteristics and high-speed applications of carrier-depletion silicon Mach-Zehnder modulators

被引:20
作者
Ogawa, Kensuke [1 ]
Ishihara, Hiroki [1 ]
Goi, Kazukiro [1 ]
Mashiko, Yasuhiro [1 ]
Lim, Soon Thor [2 ]
Sun, Min Jie [3 ]
Seah, Sean [3 ]
Png, Ching Eng [2 ]
Liow, Tsung-Yang [4 ]
Tu, Xiaoguang [4 ]
Lo, Guo-Qiang [4 ]
Kwong, Dim-Lee [4 ]
机构
[1] Fujikura Ltd, Opt & Elect Lab, Sakura, Chiba 285855, Japan
[2] ASTAR, Inst High Performance Comp, Singapore 138632, Singapore
[3] Optic2Connect Pte Ltd, Singapore 139951, Singapore
[4] ASTAR, Inst Microelect, Singapore 117685, Singapore
关键词
optical modulator; photonic integrated circuit; Mach-Zehnder interferometer; on-off keying; phase-shift keying; silicon photonics; OPTICAL MODULATION; ON-INSULATOR; WAVE-GUIDE; TRANSMISSION; PERFORMANCE; SOI;
D O I
10.1587/elex.11.20142010
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Carrier-depletion Si Mach-Zehnder modulators incorporating lateral PN-junction phase shifters are reviewed in the lights of fundamental characteristics and applications to high-speed optical fiber transmission. Experimental reverse-bias characteristics are supported by numerical analysis with good agreement, implying that the Si modulators are fabricated precisely as designed. Numerical high-speed response proves that the phase shifter operates beyond 100-Gbaud symbol rate. Traveling-wave electrodes are characterized in S-parameter measurements to reveal LRC resonance as a limiting factor in high-speed modulation. High-speed optical-fiber transmission in on-off and phase-shift keying formats is demonstrated using the Si Mach-Zehnder modulators assembled in ceramic-based metal packages.
引用
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页数:15
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