Design and performance evaluation of a novel stick-slip piezoelectric linear actuator with a centrosymmetric-type flexure hinge mechanism

被引：9

作者：

Qin, Feng ^{[1
]}

Huang, Hu ^{[1
]}

Wang, Jiru ^{[1
]}

Zhao, Hongwei ^{[1
]}

机构：

[1] Jilin Univ, Sch Mech & Aerosp Engn, Nanling Campus,5988 Renmin St, Changchun 130025, Jilin, Peoples R China

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2019年 / 25卷 / 10期

关键词：

DRIVEN; STAGE;

D O I：

10.1007/s00542-019-04329-y

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A stick-slip actuator with a centrosymmetric type flexure hinge mechanism was presented in this paper. The dimension of the actuator is approximately 83 mm x 82 mm x 19 mm. The positive and the negative motions could be achieved by two piezo stacks and one flexure hinge mechanism. To study the output characteristics, the actuator was fabricated and tested under various experimental conditions. The results showed that the maximum speeds of the positive and negative motions were 2.893 mm/s and 2.747 mm/s respectively, the maximum load was 3.8 N for both the positive and negative motions, the real displacement of a step of the positive and negative motions were 8.367 mu m and 8.412 mu m. Furthermore, the backward motion of the actuator had been greatly suppressed, which was beneficial to their wide applications in the fields of aerospace, precision-optics, nanomechanics, and so on.

引用

页码：3891 / 3898

页数：8

共 32 条

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