The probability scheme of constructing the mathematical model of shadowed sputtering

被引：1
作者：
Sevastianov, LA [1 ]
机构：
[1] PFUR, Moscow, Russia
来源：
COMPUTER PHYSICS COMMUNICATIONS | 2000年 / 130卷 / 1-2期
基金：
俄罗斯基础研究基金会;
关键词：
shadowing mask; mask function; layer function; sputtering installation;
D O I：
10.1016/S0010-4655(00)00036-9
中图分类号：
TP39 [计算机的应用];
学科分类号：
081203 ; 0835 ;
摘要：
The probability scheme of examination of the shadowed vacuum sputtering process is suggested. If one restricts the consideration by non-scattering part of the scheme the resulting model would be equivalent to geometro-optical shadowing model used by our predecessors. At the same time the scheme gives the possibility for the model improvement. Instead of complicating the model by using the multi-particle scattering it is possible to include all the deviations from geometro-optical model into the distribution function of sputtered particle. (C) 2000 Published by Elsevier Science B.V. All rights reserved.
引用
收藏
页码：41 / 46
页数：6
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