Use of Michelson and Fabry-Perot interferometry for independent determination of the refractive index and physical thickness of wafers

被引：50

作者：

Gillen, GD ^{[1
]}

Guha, S ^{[1
]}

机构：

[1] USAF, Res Lab, Anteon Corp, Mat & Mfg Directorate, Dayton, OH USA

来源：

APPLIED OPTICS | 2005年 / 44卷 / 03期

关键词：

D O I：

10.1364/AO.44.000344

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present a method to independently measure the refractive index and the thickness of materials having flat and parallel sides by using a combination of Michelson and Fabry-Perot interferometry techniques. The method has been used to deter-mine refractive-index values in the infrared with uncertainties in the third decimal place and thicknesses accurate to within +/-5 mum for materials at room and cryogenic temperatures. (C) 2005 Optical Society of America.

引用

页码：344 / 347

页数：4

共 13 条

[1]

Born M., 2002, PRINCIPLES OPTICS

[2] INTERFEROMETRIC BUT NONSPECTROSCOPIC TECHNIQUE FOR MEASURING THE THICKNESS OF A TRANSPARENT PLATE [J].

BRASUNAS, JC ;

CUSHMAN, GM .

OPTICAL ENGINEERING, 1995, 34 (07) :2126-2130

[3] Method for measuring the refractive index and the thickness of transparent plates with a lateral-shear, wavelength-scanning interferometer [J].

Coppola, G ;

Ferraro, P ;

Iodice, M ;

De Nicola, S .

APPLIED OPTICS, 2003, 42 (19) :3882-3887

[4] Refractive-index measurements of zinc germanium diphosphide at 300 and 77 K by use of a modified Michelson interferometer [J].

Gillen, GD ;

Guha, S .

APPLIED OPTICS, 2004, 43 (10) :2054-2058

[5]

Grigoriev I. S., 1997, Handbook of Physical Quantities

[6] The temperature-dependent spectral properties of filter substrate materials in the far-infrared (6-40 μm) [J].

Hawkins, G ;

Hunneman, R .

INFRARED PHYSICS & TECHNOLOGY, 2004, 45 (01) :69-79

[7]

Kumar V, 2001, CRYST RES TECHNOL, V36, P565, DOI 10.1002/1521-4079(200107)36:6<565::AID-CRAT565>3.0.CO

[8]

2-F

[9] Accurate determination of the indices of refraction of nonlinear optical crystals [J].

Nicholls, JFH ;

Henderson, B ;

Chai, BHT .

APPLIED OPTICS, 1997, 36 (33) :8587-8594

[10]

Palik E. D., 1998, HDB OPTICAL CONSTANT

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