Ferroelectric properties of lead strontium titanate thin films by RF magnetron sputtering

被引：0
|
作者：
Fujii, T [1 ]
Du, J [1 ]
Karaki, T [1 ]
Adachi, M [1 ]
机构：
[1] Toyama Prefectural Univ, Dept Elect & Informat, Fac Engn, Kosugi, Toyama 9390398, Japan
来源：
JOURNAL OF THE KOREAN PHYSICAL SOCIETY | 2003年 / 42卷
关键词：
(Pb; Sr)TiO3; RF magnetron sputtering; dielectric and ferroelectric properties; FeRAM;
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Pb-rich ferroelectric (Pb,Sr)TiO3 (PST) thin film were fabricated by RF magnetron sputtering using three types of target on Ir(111)/SiO2/Si and Ir(100)/SrTiO3(100) substrates. With using two types of ceramics PST target (Pb/Sr-35/65 and 75/25), prepared PST films showed polycrystalline with a large Ti content compared to the stoichiometric value. To arrange the Pb/(Pb+Sr) and Ti/(Pb+Sr) ratio stoichiometry, third type of a multi-element target, which was comprised of calcined PbO pellets, Ti chips and ceramics SrTiO3 target, was used. After composition control, epitaxial PST thin film was obtained, and its remanent polarization and coercive field were 30 muC/cm(2) and 60 kV/cm, respectively.
引用
收藏
页码：S1178 / S1181
页数：4
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