Microbolometer detector arrays for the infrared and terahertz ranges

被引：22

作者：

Dem'yanenko, M. A. ^{[1
]}

Esaev, D. G. ^{[1
]}

Ovsyuk, V. N. ^{[1
]}

Fomin, B. I. ^{[1
]}

Aseev, A. L. ^{[1
]}

Knyazev, B. A. ^{[2
,3
]}

Kulipanov, G. N. ^{[3
]}

Vinokurov, N. A. ^{[3
]}

机构：

[1] Russian Acad Sci, AV Rzhanov Inst Semicond Phys, Siberian Sect, Novosibirsk, Russia

[2] Novosibirsk State Univ, Novosibirsk 630090, Russia

[3] Russian Acad Sci, GI Budker Inst Nucl Phys, Siberian Sect, Novosibirsk, Russia

来源：

JOURNAL OF OPTICAL TECHNOLOGY | 2009年 / 76卷 / 12期

关键词：

D O I：

10.1364/JOT.76.000739

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This paper presents the results of the development of photodetectors for the IR and terahertz ranges, based on uncooled microbolometer detector arrays fabricated by the sol-gel technology. Detectors with a 320 x 240-element format are demonstrated, having a temperature resolution better than 100 mK and a threshold power of 160 pW/pixel in the 8-14-mu m range, with a response time of 12-16 ms. The threshold power at a wavelength of 130 Am was 33 nW/pixel for a terahertz image visualized in a 160 x 120 format at a rate of 90 frame/sec. A design was developed to match an antenna with an uncooled high-resistance integrated microbolometer, allowing the detector sensitivity to be significantly increased in the terahertz range. (C) 2009 Optical Society of America.

引用

页码：739 / 743

页数：5

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