Microbolometer detector arrays for the infrared and terahertz ranges

被引：22
|
作者：
Dem'yanenko, M. A. [1 ]
Esaev, D. G. [1 ]
Ovsyuk, V. N. [1 ]
Fomin, B. I. [1 ]
Aseev, A. L. [1 ]
Knyazev, B. A. [2 ,3 ]
Kulipanov, G. N. [3 ]
Vinokurov, N. A. [3 ]
机构：
[1] Russian Acad Sci, AV Rzhanov Inst Semicond Phys, Siberian Sect, Novosibirsk, Russia
[2] Novosibirsk State Univ, Novosibirsk 630090, Russia
[3] Russian Acad Sci, GI Budker Inst Nucl Phys, Siberian Sect, Novosibirsk, Russia
来源：
JOURNAL OF OPTICAL TECHNOLOGY | 2009年 / 76卷 / 12期
关键词：
D O I：
10.1364/JOT.76.000739
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
This paper presents the results of the development of photodetectors for the IR and terahertz ranges, based on uncooled microbolometer detector arrays fabricated by the sol-gel technology. Detectors with a 320 x 240-element format are demonstrated, having a temperature resolution better than 100 mK and a threshold power of 160 pW/pixel in the 8-14-mu m range, with a response time of 12-16 ms. The threshold power at a wavelength of 130 Am was 33 nW/pixel for a terahertz image visualized in a 160 x 120 format at a rate of 90 frame/sec. A design was developed to match an antenna with an uncooled high-resistance integrated microbolometer, allowing the detector sensitivity to be significantly increased in the terahertz range. (C) 2009 Optical Society of America.
引用
收藏
页码：739 / 743
页数：5
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