Femtosecond Laser Fabrication of Monolithically Integrated Microfluidic Sensors in Glass

被引：83

作者：

He, Fei ^{[1
]}

Liao, Yang ^{[1
]}

Lin, Jintian ^{[1
]}

Song, Jiangxin ^{[1
]}

Qiao, Lingling ^{[1
]}

Cheng, Ya ^{[1
]}

Sugioka, Koji ^{[2
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China

[2] RIKEN Ctr Adv Photon, Wako, Saitama 3510198, Japan

来源：

SENSORS | 2014年 / 14卷 / 10期

基金：

中国国家自然科学基金;

关键词：

femtosecond laser; microfabrication; glass material; micro-/nanofluidics; lab-on-a-chip; optofluidics; electrofluidics; surface-enhanced Raman-scattering; lab-on-fiber; OPTICAL WAVE-GUIDES; FABRY-PEROT-INTERFEROMETER; PHOTOSENSITIVE GLASS; FUSED-SILICA; SELECTIVE METALLIZATION; INDUCED BREAKDOWN; REPETITION-RATE; FIBER GRATINGS; RAMAN-SPECTRA; SURFACE;

D O I：

10.3390/s141019402

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Femtosecond lasers have revolutionized the processing of materials, since their ultrashort pulse width and extremely high peak intensity allows high-quality micro-and nanofabrication of three-dimensional (3D) structures. This unique capability opens up a new route for fabrication of microfluidic sensors for biochemical applications. The present paper presents a comprehensive review of recent advancements in femtosecond laser processing of glass for a variety of microfluidic sensor applications. These include 3D integration of micro-/nanofluidic, optofluidic, electrofluidic, surface-enhanced Raman-scattering devices, in addition to fabrication of devices for microfluidic bioassays and lab-on-fiber sensors. This paper describes the unique characteristics of femtosecond laser processing and the basic concepts involved in femtosecond laser direct writing. Advanced spatiotemporal beam shaping methods are also discussed. Typical examples of microfluidic sensors fabricated using femtosecond lasers are then highlighted, and their applications in chemical and biological sensing are described. Finally, a summary of the technology is given and the outlook for further developments in this field is considered.

引用

页码：19402 / 19440

页数：39

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