Femtosecond Laser Fabrication of Monolithically Integrated Microfluidic Sensors in Glass

被引：79
作者：
He, Fei [1 ]
Liao, Yang [1 ]
Lin, Jintian [1 ]
Song, Jiangxin [1 ]
Qiao, Lingling [1 ]
Cheng, Ya [1 ]
Sugioka, Koji [2 ]
机构：
[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China
[2] RIKEN Ctr Adv Photon, Wako, Saitama 3510198, Japan
来源：
SENSORS | 2014年 / 14卷 / 10期
基金：
中国国家自然科学基金;
关键词：
femtosecond laser; microfabrication; glass material; micro-/nanofluidics; lab-on-a-chip; optofluidics; electrofluidics; surface-enhanced Raman-scattering; lab-on-fiber; OPTICAL WAVE-GUIDES; FABRY-PEROT-INTERFEROMETER; PHOTOSENSITIVE GLASS; FUSED-SILICA; SELECTIVE METALLIZATION; INDUCED BREAKDOWN; REPETITION-RATE; FIBER GRATINGS; RAMAN-SPECTRA; SURFACE;
D O I：
10.3390/s141019402
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Femtosecond lasers have revolutionized the processing of materials, since their ultrashort pulse width and extremely high peak intensity allows high-quality micro-and nanofabrication of three-dimensional (3D) structures. This unique capability opens up a new route for fabrication of microfluidic sensors for biochemical applications. The present paper presents a comprehensive review of recent advancements in femtosecond laser processing of glass for a variety of microfluidic sensor applications. These include 3D integration of micro-/nanofluidic, optofluidic, electrofluidic, surface-enhanced Raman-scattering devices, in addition to fabrication of devices for microfluidic bioassays and lab-on-fiber sensors. This paper describes the unique characteristics of femtosecond laser processing and the basic concepts involved in femtosecond laser direct writing. Advanced spatiotemporal beam shaping methods are also discussed. Typical examples of microfluidic sensors fabricated using femtosecond lasers are then highlighted, and their applications in chemical and biological sensing are described. Finally, a summary of the technology is given and the outlook for further developments in this field is considered.
引用
收藏
页码：19402 / 19440
页数：39
相关论文
共 156 条
  • [1] ANOMALOUSLY INTENSE RAMAN-SPECTRA OF PYRIDINE AT A SILVER ELECTRODE
    ALBRECHT, MG
    CREIGHTON, JA
    [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1977, 99 (15) : 5215 - 5217
  • [2] Slit beam shaping method for femtosecond laser direct-write fabrication of symmetric waveguides in bulk glasses
    Ams, M
    Marshall, GD
    Spence, DJ
    Withford, MJ
    [J]. OPTICS EXPRESS, 2005, 13 (15) : 5676 - 5681
  • [3] Investigation of Ultrafast Laser-Photonic Material Interactions: Challenges for Directly Written Glass Photonics
    Ams, Martin
    Marshall, Graham D.
    Dekker, Peter
    Dubov, Mykhaylo
    Mezentsev, Vladimir K.
    Bennion, Ian
    Withford, Michael J.
    [J]. IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2008, 14 (05) : 1370 - 1381
  • [4] Ultrafast laser written active devices
    Ams, Martin
    Marshall, Graham D.
    Dekker, Peter
    Piper, James A.
    Withford, Michael J.
    [J]. LASER & PHOTONICS REVIEWS, 2009, 3 (06) : 535 - 544
  • [5] Femtosecond laser fabricated monolithic chip for optical trapping and stretching of single cells
    Bellini, N.
    Vishnubhatla, K. C.
    Bragheri, F.
    Ferrara, L.
    Minzioni, P.
    Ramponi, R.
    Cristiani, I.
    Osellame, R.
    [J]. OPTICS EXPRESS, 2010, 18 (05): : 4679 - 4688
  • [6] Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica.
    Bellouard, Y
    Said, AA
    Bado, P
    [J]. OPTICS EXPRESS, 2005, 13 (17): : 6635 - 6644
  • [7] Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching
    Bellouard, Y
    Said, A
    Dugan, M
    Bado, P
    [J]. OPTICS EXPRESS, 2004, 12 (10): : 2120 - 2129
  • [8] The Femtoprint Project
    Bellouard, Y.
    Champion, A.
    Lenssen, B.
    Matteucci, M.
    Schaap, A.
    Beresna, M.
    Corbari, C.
    Gecevicius, M.
    Kazansky, P.
    Chappuis, O.
    Kral, M.
    Clavel, R.
    Barrot, F.
    Breguet, J. -M.
    Mabillard, Y.
    Bottinelli, S.
    Hopper, M.
    Hoenninger, C.
    Mottay, E.
    Lopez, J.
    [J]. JOURNAL OF LASER MICRO NANOENGINEERING, 2012, 7 (01): : 1 - 10
  • [9] Optically produced arrays of planar nanostructures inside fused silica
    Bhardwaj, VR
    Simova, E
    Rajeev, PP
    Hnatovsky, C
    Taylor, RS
    Rayner, DM
    Corkum, PB
    [J]. PHYSICAL REVIEW LETTERS, 2006, 96 (05)
  • [10] Surface and bulk structuring of materials by ripples with long and short laser pulses: Recent advances
    Buividas, Riacardas
    Mikutis, Mindaugas
    Juodkazis, Saulius
    [J]. PROGRESS IN QUANTUM ELECTRONICS, 2014, 38 (03) : 119 - 156
12345678910