Super-resolution nanofabrication with metal-ion doped hybrid material through an optical dual-beam approach

被引:7
作者
Cao, Yaoyu [1 ]
Li, Xiangping [1 ]
Gu, Min [1 ]
机构
[1] Swinburne Univ Technol, Ctr Microphoton, Fac Sci Engn & Technol, Hawthorn, Vic 3122, Australia
基金
澳大利亚研究理事会;
关键词
POLYMERIZATION; REDUCTION; LITHOGRAPHY; FABRICATION; ABSORPTION; RESOLUTION; SILVER;
D O I
10.1063/1.4905056
中图分类号
O59 [应用物理学];
学科分类号
摘要
We apply an optical dual-beam approach to a metal-ion doped hybrid material to achieve nanofeatures beyond the optical diffraction limit. By spatially inhibiting the photoreduction and the photopolymerization, we realize a nano-line, consisting of polymer matrix and in-situ generated gold nanoparticles, with a lateral size of sub 100 nm, corresponding to a factor of 7 improvement compared to the diffraction limit. With the existence of gold nanoparticles, a plasmon enhanced super-resolution fabrication mechanism in the hybrid material is observed, which benefits in a further reduction in size of the fabricated feature. The demonstrated nanofeature in hybrid materials paves the way for realizing functional nanostructures. (C) 2014 AIP Publishing LLC.
引用
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页数:4
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