Atom probe;
Quantitative analysis;
Field evaporation;
Preferential evaporation;
Copper;
FIELD-ION EMITTER;
NUMERICAL-CALCULATION;
TOMOGRAPHY;
TEMPERATURE;
EVAPORATION;
OPTIMIZATION;
IRRADIATION;
MICROSCOPY;
EVOLUTION;
DETECTOR;
D O I:
10.1016/j.ultramic.2017.01.015
中图分类号:
TH742 [显微镜];
学科分类号:
摘要:
The difference in quantitative analysis performance between the voltage-mode and laser-mode of a local electrode atom probe (LEAP3000X HR) was investigated using a Fe-Cu binary model alloy. Solute copper atoms in ferritic iron preferentially field evaporate because of their significantly lower evaporation field than the matrix iron, and thus, the apparent concentration of solute copper tends to be lower than the actual concentration. However, in voltage-mode, the apparent concentration was higher than the actual concentration at 40K or less due to a detection loss of matrix iron, and the concentration decreased with increasing specimen temperature due to the preferential evaporation of solute copper. On the other hand, in laser-mode, the apparent concentration never exceeded the actual concentration, even at lower temperatures (20K), and this mode showed better quantitative performance over a wide range of specimen temperatures. These results indicate that the pulsed laser atom probe prevents both detection loss and preferential evaporation under a wide range of measurement conditions. (C) 2017 Elsevier B.V. All rights reserved.
机构:
Univ Grenoble Alpes, F-38000 Grenoble, France
CEA Grenoble, LETI, F-38054 Grenoble, France
STMicroelectronics, F-38926 Crolles, France
Univ Rouen, GPM, CNRS, UMR 6634, F-76821 Mont St Aignan, FranceUniv Grenoble Alpes, F-38000 Grenoble, France
Estivill, Robert
Grenier, Adeline
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机构:
Univ Grenoble Alpes, F-38000 Grenoble, France
CEA Grenoble, LETI, F-38054 Grenoble, FranceUniv Grenoble Alpes, F-38000 Grenoble, France
Grenier, Adeline
Duguay, Sebastien
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机构:
Univ Rouen, GPM, CNRS, UMR 6634, F-76821 Mont St Aignan, FranceUniv Grenoble Alpes, F-38000 Grenoble, France
Duguay, Sebastien
Vurpillot, Franois
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Univ Rouen, GPM, CNRS, UMR 6634, F-76821 Mont St Aignan, FranceUniv Grenoble Alpes, F-38000 Grenoble, France
Vurpillot, Franois
Terlier, Tanguy
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h-index: 0
机构:
Univ Grenoble Alpes, F-38000 Grenoble, France
CEA Grenoble, LETI, F-38054 Grenoble, France
STMicroelectronics, F-38926 Crolles, FranceUniv Grenoble Alpes, F-38000 Grenoble, France
Terlier, Tanguy
Barnes, Jean-Paul
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机构:
Univ Grenoble Alpes, F-38000 Grenoble, France
CEA Grenoble, LETI, F-38054 Grenoble, France
STMicroelectronics, F-38926 Crolles, FranceUniv Grenoble Alpes, F-38000 Grenoble, France
Barnes, Jean-Paul
Hartmann, Jean-Michel
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机构:
Univ Grenoble Alpes, F-38000 Grenoble, France
CEA Grenoble, LETI, F-38054 Grenoble, France
STMicroelectronics, F-38926 Crolles, FranceUniv Grenoble Alpes, F-38000 Grenoble, France
Hartmann, Jean-Michel
Blavette, Didier
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机构:
Univ Rouen, GPM, CNRS, UMR 6634, F-76821 Mont St Aignan, FranceUniv Grenoble Alpes, F-38000 Grenoble, France
机构:
CNRS, UFR Sci Site Madrillet, Grp Phys Mat, UMR 6634, F-76801 St Etienne, FranceCNRS, UFR Sci Site Madrillet, Grp Phys Mat, UMR 6634, F-76801 St Etienne, France
Vella, A.
Houard, J.
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h-index: 0
机构:
CNRS, UFR Sci Site Madrillet, Grp Phys Mat, UMR 6634, F-76801 St Etienne, FranceCNRS, UFR Sci Site Madrillet, Grp Phys Mat, UMR 6634, F-76801 St Etienne, France
Houard, J.
Vurpillot, F.
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h-index: 0
机构:
CNRS, UFR Sci Site Madrillet, Grp Phys Mat, UMR 6634, F-76801 St Etienne, FranceCNRS, UFR Sci Site Madrillet, Grp Phys Mat, UMR 6634, F-76801 St Etienne, France
Vurpillot, F.
Deconihout, B.
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h-index: 0
机构:
CNRS, UFR Sci Site Madrillet, Grp Phys Mat, UMR 6634, F-76801 St Etienne, FranceCNRS, UFR Sci Site Madrillet, Grp Phys Mat, UMR 6634, F-76801 St Etienne, France