共 18 条
[1]
Hard x-ray Fresnel prisms: Properties and applications
[J].
DESIGN AND MICROFABRICATION OF NOVEL X-RAY OPTICS II,
2004, 5539
:88-94
[3]
Goodman J., 1985, Statistical Optics
[4]
Goodman J., 1996, Opt. Eng
[5]
Cyclic, cryogenic, highly anisotropic plasma etching of silicon using SF6/O2
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
2008, 26 (05)
:1182-1187
[9]
Liu Y, 2001, PHYS REV A, V63, DOI 10.1103/PhysRevA.63.033802