Reactively sputtered Ta2O5 solid electrolyte layers in all thin film electrochromic devices

被引：21
作者：
Wang, Rui [1 ]
Pan, Lijun [1 ,2 ]
Han, Qiaonan [1 ]
Zhu, Hongbing [1 ]
Wan, Meixiu [1 ]
Mai, Yaohua [1 ]
机构：
[1] Jinan Univ, Coll Informat Sci & Technol, Inst New Energy Technol, Guangzhou 510632, Peoples R China
[2] Wuyi Univ, Jiangmen 529020, Peoples R China
来源：
JOURNAL OF ALLOYS AND COMPOUNDS | 2021年 / 865卷
基金：
中国国家自然科学基金;
关键词：
Ta2O5; Solid electrolyte; ATF-ECDs; Protonic conductivity; Reactive magnetron sputtering; TANTALUM OXIDE; PROTON TRANSPORT; OPTICAL-PROPERTIES; VEHICLE MECHANISM; ZINC-OXIDE; DC; CONDUCTIVITY; ENERGY; TECHNOLOGIES; COATINGS;
D O I：
10.1016/j.jallcom.2021.158931
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The tantalum pentoxide (Ta2O5) thin films used as protonic conductive solid electrolyte layers (SELs) in all thin film electrochromic devices (ATF-ECDs) were widely investigated. The working pressure played a great role in the microstructure and proton transfer of the Ta2O5 thin films. The Ta2O5 thin films were deposited by direct current (DC) reactive magnetron sputtering at different working pressures and growth mechanism was studied. The optical properties, structural properties, chemical compositions, morphologies and protonic conductive properties of the Ta2O5 thin films were systematically investigated. Moreover, the electrochromic properties for corresponding ATF-ECDs with Ta2O5 SELs were studied as well. The ATF-ECD with a 2.0 Pa Ta2O5 SEL exhibited the best device performance with high optical modulation and fast switch speeds. (C) 2021 Elsevier B.V. All rights reserved.
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页数：10
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