Capability of LiTaO3/Quartz HAL SAW Resonators Confirmed by Simulation and Measurement

被引:8
|
作者
Kadota, Michio [1 ]
Ishii, Yoshimi [1 ]
Tanaka, Shuji [1 ]
机构
[1] Tohoku Univ, Grad Sch Engn, Sendai, Miyagi, Japan
来源
PROCEEDINGS OF THE 2019 JOINT CONFERENCE OF THE IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM AND EUROPEAN FREQUENCY AND TIME FORUM (EFTF-IFCS 2019) | 2019年
关键词
SAW resonator; LiTaO3; quartz; impedance ratio; simulation; hetero acoustic layer; LT thickness;
D O I
10.1109/fcs.2019.8856040
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
This paper reports hetero acoustic layer (HAL) surface acoustic wave (SAW) resonators using a thin LiTaO3 (LT) plate with negative TCF and a quartz substrate with positive TCF. In the previous study, a high impedance (2) ratio (82 dB), an excellent temperature coefficient of frequency (TCF: 2 ppm/degrees C), and spurious-free characteristic up to 14 GHz were demonstrated. In this study, two kinds of LT/ quartz HAL SAW resonators with different wavelengths of interdigital transducer (IDT) were fabricated, and measured results were compared with simulated ones. The measured bandwidths (BWs) roughly agreed with the simulated ones. Although many measured values of Z ratios are lower than the simulated ones, the best Z ratios among them are similar to the simulated ones. This result is reasonable taking account of the imperfectness of laboratory-level fabrication, and suggests that the simulation in this study well predicts the performance of real devices.
引用
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页数:4
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