A review of micro-devices assembly techniques and technology

被引：45

作者：

Cecil, J. ^{[1
]}

Kumar, M. B. Bharathi Raj ^{[1
]}

Lu, Yajun ^{[1
]}

Basallali, Vinod ^{[2
]}

机构：

[1] Oklahoma State Univ, Sch Ind Engn & Management, Ctr Informat Centr Engn CICE, Stillwater, OK 74078 USA

[2] Oklahoma State Univ, Sch Ind Engn & Management, Stillwater, OK 74078 USA

来源：

INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY | 2016年 / 83卷 / 9-12期

基金：

美国国家科学基金会;

关键词：

Micro-assembly; Automation; Gripping; Virtual reality; Work cells; SMA MICROGRIPPER; VIRTUAL-REALITY; WORK CELL; FEEDBACK; SYSTEM; MICROMANIPULATION; MICROSTRUCTURES; SIMULATION; GRIPPER; DRIVEN;

D O I：

10.1007/s00170-015-7698-6

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper provides a review of techniques and technology relevant to the field of micro-devices assembly (MDA). MDA is an emerging domain of importance which is expected to have a substantial impact on a range of industrial fields including sensors, surveillance devices, and semiconductor devices. This paper provides a review of a cross-section of research including micro-gripping design and manipulation techniques, work cell design and factory automation, self-assembly techniques, and virtual reality-based approaches in micro-assembly. A discussion of the key challenges for this domain along with directions for future research is also provided.

引用

页码：1569 / 1581

页数：13

共 82 条

[1]

Alex J, 1998, P DETC 98 ASME DES E

[2] Microgrippers fabricated by the LIGA technique [J].

Ballandras, S ;

Basrour, S ;

Robert, L ;

Megtert, S ;

Blind, P ;

Rouillay, M ;

Bernede, P ;

Daniau, W .

SENSORS AND ACTUATORS A-PHYSICAL, 1997, 58 (03) :265-272

[3] Self-assembly: a review of recent developments [J].

Bogwe, Robert .

ASSEMBLY AUTOMATION, 2008, 28 (03) :211-215

[4] VISION-BASED HAPTIC FEEDBACK FOR REMOTE MICROMANIPULATION IN-SEM ENVIRONMENT [J].

Bolopion, Aude ;

Dahmen, Christian ;

Stolle, Christian ;

Haliyo, Sinan ;

Regnier, Stephane ;

Fatikow, Sergej .

INTERNATIONAL JOURNAL OF OPTOMECHATRONICS, 2012, 6 (03) :236-252

[5]

Burgard M., 2012, IFIP AICT, V371, P36

[6]

Cassier C, 2002, P 2002 INT C INT ROB

[7] Assembly and manipulation of micro devices - A state of the art survey [J].

Cecil, J. ;

Powell, Derek ;

Vasquez, Dartiel .

ROBOTICS AND COMPUTER-INTEGRATED MANUFACTURING, 2007, 23 (05) :580-588

[8] Development of a virtual and physical work cell to assemble micro-devices [J].

Cecil, J ;

Gobinath, N .

ROBOTICS AND COMPUTER-INTEGRATED MANUFACTURING, 2005, 21 (4-5) :431-441

[9] VREM: An advanced virtual environment for micro assembly [J].

Cecil, J. ;

Jones, James .

INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2014, 72 (1-4) :47-56

[10]

Cecil J., 2013, 2013 IEEE International Conference on Automation Science and Engineering (CASE), P128, DOI 10.1109/CoASE.2013.6653998

← 1 2 3 4 5 6 7 8 9 →