Use of reflectance spectroscopy for in-situ monitoring of InP/InGaAsP films grown by MOVPE

被引：0
|
作者：
Lum, RM [1 ]
McDonald, ML [1 ]
Bean, JC [1 ]
Vandenberg, J [1 ]
Pernell, TL [1 ]
Chu, SNG [1 ]
机构：
[1] AT&T BELL LABS,MURRAY HILL,NJ 07974
来源：
1996 EIGHTH INTERNATIONAL CONFERENCE ON INDIUM PHOSPHIDE AND RELATED MATERIALS | 1996年
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：578 / 581
页数：4
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