Splitting of porous silicon microcavity mode due to the interaction with Si-H vibrations

被引:11
作者
Mattei, G
Marucci, A
Yakovlev, VA
机构
[1] CNR, Ist Metodol Avanzate Inorgan, Area Ric Roma, I-00016 Monterotondo, Italy
[2] CNR, MITER, Area Ric Roma, I-00016 Monterotondo, Italy
[3] Russian Acad Sci, Inst Spect, Troitsk 142092, Moscow Reg, Russia
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1998年 / 51卷 / 1-3期
关键词
infrared; microcavity; porous silicon; enhancement;
D O I
10.1016/S0921-5107(97)00251-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A Fabry-Perot microcavity centred in the infrared around 2000-2200 cm(-1) has been realised by controlling the current and the time of a steps anodization procedure of a p(+) type silicon wafer in an electrochemical cell with a hydrofluoric acid solution. The interaction of the cavity mode, detectable as a sharp deep in the high reflectivity plateau, with the Si-H vibration modes gives rise to a splitting of the cavity mode dispersion curve (frequency vs wavevector) and to an enhancement of the infrared absorption of the Si-H bands. Both, the dispersion of the coupled modes (cavity/Si-H modes) and their infrared absorption enhancement have been studied. (C) 1998 Elsevier Science S.A. All rights reserved.
引用
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页码:158 / 161
页数:4
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