Femtosecond laser direct patterning of sensing materials toward flexible integration of micronanosensors

被引：28

作者：

Guo, Li ^{[1
]}

Xia, Hong ^{[1
]}

Fan, Hui-Tao ^{[1
]}

Zhang, Yong-Lai ^{[1
]}

Chen, Qi-Dai ^{[1
]}

Zhang, Tong ^{[1
]}

Sun, Hong-Bo ^{[1
,2
]}

机构：

[1] Jilin Univ, Coll Elect Sci & Engn, State Key Lab Integrated Optoelect, Changchun 130012, Peoples R China

[2] Jilin Univ, Coll Phys, Changchun 130023, Peoples R China

来源：

OPTICS LETTERS | 2010年 / 35卷 / 10期

关键词：

SENSOR; FILMS;

D O I：

10.1364/OL.35.001695

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Reported is femtosecond laser direct patterning of sensing materials toward flexible integration of micronanosensors (FIMS), meaning the capability to fabricate multiple functional sensors of smaller size on a nonflat surface of a substrate that is not limited to silicon. As a representative example, a photosensitive SnO2 colloidal solution (sol) was developed, from which complex micronanostructures were written via a two-photon absorption process. After thermal decomposition of organic components, the patterned SnO2 microsensors responded to relative humidity (RH) with a variation range of 5 orders of magnitude. FIMS would open a new door for miniaturization of micronanosensors expected in intelligent microsystems. (C) 2010 Optical Society of America

引用

页码：1695 / 1697

页数：3

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