True Young modulus of Pb(Zr,Ti)O3 films measured by nanoindentation

In order to assess transverse elastic modulus of lead zirconate titanate (PZT) thin films, we used a nanoindenter with constant monitoring of the force. It is shown that the true elastic modulus, i.e., the low pressure elastic modulus, can be measured by this method. This permitted a determination that sputter deposited PZT (54/46) films display a Young modulus close to a ferroelectric hard type PZT bulk ceramic. Moreover, this low pressure modulus is independent of grain size and thickness of the film, but this is no more true for high pressure modulus. This provides a step toward a better understanding of the properties of these PZT films and the possibility to better use them in microsystems. (C) 2004 American Institute of Physics.