Synthesis and characterization of BNT thin films prepared by Sol-Gel method

Polycrystalline piezoelectric lead-free Bi0.5Na0.5TiO3 (abbreviated as BNT) thin films were deposited on Pt/TiO2/SiO2/Si substrates by an optimized Sol-Gel process. The phase structure and morphology of the as-prepared product were examined by X-ray diffraction (XRD), Raman spectroscopy and scanning electron microscopy (SEM). The film treated at 700 degrees C with the rapid thermal processor (RTP) for 30 sec is dense and well crystallized in the rhombohedral perovskite phase. The dielectric constant and loss tangent at 10 kHz are 420 and 0.07%, respectively, while the remnant polarization and coercive field are 12 mu C/cm(2) and 120 kV/cm, respectively, at 1000 Hz. (C) 2016 Elsevier Ltd. All rights reserved.