Post-buckling dynamic behavior of self-assembled 3D microstructures

The paper presents the snap-through phenomenon in the case of micro fabricated clamped-clamped buckled beam. This dynamic post-buckling behavior is likely to occur in 3D microstructures when they are subjected to large vibration amplitudes. The main difference between this work and previous studies is the MEMS specific beam dimension, especially the large initial deflection of the buckled beam that involves the inversion of the two first resonance frequencies. The mathematical development allows showing how the vibration amplitude of the supporting base affects the post-buckling dynamic behavior of the beam. For each frequency, the limit between the stable behavior and the snap-through behavior is evaluated. Moreover, the effect of environment is taken into account from the damping point of view. Samples are fabricated and the experiment is described. Measurements are compared to the theoretical approach and the results are in good agreement with the proposed model.