Analytical simulation of RBS spectra of nanowire samples

被引：10

作者：

Barradas, Nuno P. ^{[1
]}

Garcia Nunez, C. ^{[2
]}

Redondo-Cubero, A. ^{[2
,3
]}

Shen, G. ^{[4
]}

Kung, P. ^{[4
]}

Pau, J. L. ^{[2
]}

机构：

[1] Univ Lisbon, Inst Super Tecn, Ctr Ciencias & Tecnol Nucl, EN 10 Km 139,7, P-2695066 Bobadela Lrs, Portugal

[2] Univ Autonoma Madrid, Lab Elect & Semicond, Dept Fis Aplicada, E-28049 Madrid, Spain

[3] Univ Autonoma Madrid, Ctr Microanal Mat, E-28049 Madrid, Spain

[4] Univ Alabama, Dept Elect & Comp Engn, Tuscaloosa, AL 35487 USA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2016年 / 371卷

关键词：

Simulation; NDF; RBS; Nanowires; ZnO; ION-BEAM ANALYSIS; RUTHERFORD BACKSCATTERING ANALYSIS; ERROR ANALYSIS; MONTE-CARLO; THIN-FILMS; ROUGHNESS; SPECTROMETRY; MULTILAYERS;

D O I：

10.1016/j.nimb.2015.08.080

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Almost all, if not all, general purpose codes for analysis of Ion Beam Analysis data have been originally developed to handle laterally homogeneous samples only. This is the case of RUMP, NDF, SIMNRA, and even of the Monte Carlo code Corteo. General-purpose codes usually include only limited support for lateral inhomogeneity. In this work, we show analytical simulations of samples that consist of a layer of parallel oriented nanowires on a substrate, using a model implemented in NDF. We apply the code to real samples, made of vertical ZnO nanowires on a sapphire substrate. Two configurations of the nanowires were studied: 40 nm diameter, 4.1 mu m height, 3.5% surface coverage; and 55 nm diameter, 1.1 mu m height, 42% surface coverage. We discuss the accuracy and limits of applicability of the analysis. (C) 2015 Elsevier B.V. All rights reserved.

引用

页码：116 / 120

页数：5

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