Influence of residual Ar+ in Ar cluster ion beam for DLC film formation

被引：2
作者：
Kitagawa, T
Miyauchi, K
Toyoda, N
Kanda, K
Ikeda, T
Tsubakino, H
Matsuo, J
Matsui, S
Yamada, I
机构：
[1] Himeji Inst Technol, Lab Adv Sci & Technol Ind, Himeji, Hyogo 6781205, Japan
[2] Kyoto Univ, Ion Beam Engn Expt Lab, Sakyo Ku, Kyoto, Japan
[3] Himeji Inst Technol, Fac Engn, Himeji, Hyogo 67122, Japan
[4] Nomura Plating Co Ltd, Osaka, Japan
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2003年 / 206卷
关键词：
diamond-like carbon; Ar cluster ion; monomer; NEXAFS;
D O I：
10.1016/S0168-583X(03)00889-9
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
In order to study the influences of residual Ar monomer ion (Ar+) on sp(2) content and hardness of diamond like carbon (DLC) films formed by Ar cluster ion beam assisted deposition, Ar cluster ion, Ar+ and their mixed ions (Ar cluster ion and Ar+) bombardments were performed during evaporation of C-60. From near edge X-ray absorption fine structure (NEXAFS) and Raman spectroscopy measurements, lower sp(2) content in the carbon films was obtained with Ar cluster ion bombardment than that with Ar+ and mixed ion. Furthermore higher hardness and smooth surface were shown with Ar cluster ion bombardments. Therefore it was important to reduce Ar+ in Ar cluster ion beams to obtain hard DLC films with flat surface. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：884 / 888
页数：5
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