Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology

被引：9

作者：

Wang, Bao-Xu ^{[1
]}

Zheng, Jia-Xin ^{[1
]}

Qi, Jin-Yong ^{[1
]}

Guo, Ming-Rui ^{[1
]}

Gao, Bing-Rong ^{[1
]}

Liu, Xue-Qing ^{[1
]}

机构：

[1] Jilin Univ, Coll Elect Sci & Engn, State Key Lab Integrated Optoelect, Changchun 130012, Peoples R China

来源：

MICROMACHINES | 2022年 / 13卷 / 02期

基金：

中国国家自然科学基金;

关键词：

MOEMS; silicon microcantilever; multifocal microlens array; femtosecond laser; dry etching; FABRICATION; SCANNER;

D O I：

10.3390/mi13020218

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Micro-opto-electromechanical systems (MOEMSs) are a new class of integrated and miniaturized optical systems that have significant applications in modern optics. However, the integration of micro-optical elements with complex morphologies on existing micro-electromechanical systems is difficult. Herein, we propose a femtosecond-laser-assisted dry etching technology to realize the fabrication of silicon microlenses. The size of the microlens can be controlled by the femtosecond laser pulse energy and the number of pulses. To verify the applicability of this method, multifocal microlens arrays (focal lengths of 7-9 mu m) were integrated into a silicon microcantilever using this method. The proposed technology would broaden the application scope of MOEMSs in three-dimensional imaging systems.

引用

页数：10