Polycrystal orientation maps from TEM

被引:100
作者
Fundenberger, JJ
Morawiec, A
Bouzy, E
Lecomte, JS
机构
[1] Univ Metz, CNRS, UMR 7078, Inst Super Genie Mecan & Prod,LETAM, F-57045 Metz 1, France
[2] PAN, Inst Met & Inzynierii Materialowej, Krakow, Poland
关键词
instrument control and alignment; electron diffraction; convergent beam electron diffraction (CBED); data processing/image processing;
D O I
10.1016/S0304-3991(02)00435-7
中图分类号
TH742 [显微镜];
学科分类号
摘要
Determination of topography of crystallite orientations is an important technique of investigation of polycrystalline materials. A system for creating orientation maps using transmission electron microscope (TEM) Kikuchi patterns and Convergent beam electron diffraction patterns is presented. The orientation maps are obtained using a step-by-step beam scan on a computer-controlled TEM equipped with a CCD camera. At each step, acquired diffraction patterns are indexed and orientations are determined. Although, the approach used is similar to that applied in SEM/electron back scattered diffraction (EBSD) orientation imaging setups, the TEM-based system considerably differs from its SEM counterpart. The main differences appear due to specific features of TEM and SEM diffraction patterns. Also, the resulting maps are not equivalent. On these generated by TEM, the accuracy of orientation determination can be better than 0.1degrees. The spatial resolution is estimated to be about 10 nm. The latter feature makes the TEM orientation mapping system an important tool for studies at fine scale unreachable by SEM/EBSD systems. The automatic orientation mapping is expected to be a useful complement of the conventional TEM contrast images. The new technique will be essential for characterization of fine structure materials. To illustrate that, example maps of an aluminum sample produced by severe plastic deformation are included. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:127 / 137
页数:11
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