Global simulation of the induction heating TSSG process of SiC for the effects of Marangoni convection, free surface deformation and seed rotation

被引：32

作者：

Yamamoto, Takuya ^{[1
]}

Okano, Yasunori ^{[1
]}

Ujihara, Toru ^{[2
]}

Dost, Sadik ^{[3
]}

机构：

[1] Osaka Univ, Dept Mat Engn Sci, Toyonaka, Osaka 5608531, Japan

[2] Nagoya Univ, Dept Crystalline Mat Sci, Chikusa Ku, Nagoya, Aichi 4648603, Japan

[3] Univ Victoria, Crystal Growth Lab, Victoria, BC V8W 3P6, Canada

来源：

JOURNAL OF CRYSTAL GROWTH | 2017年 / 470卷

关键词：

Computer simulation; Fluid flows; Magnetic fields; Heat transfer; Mass transfer; Top seeded solution growth; SOLUTION GROWTH; MAGNETIC-FIELD; SILICON; CRYSTAL; MODEL;

D O I：

10.1016/j.jcrysgro.2017.04.016

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

A global numerical simulation was performed for the induction heating Top-Seeded Solution Growth (TSSG) process of SiC. Analysis included the furnace and growth melt. The effects of interfacial force due to free surface tension gradient, the RF coil-induced electromagnetic body force, buoyancy, melt free surface deformation, and seed rotation were examined. The simulation results showed that the contributions of free surface tension gradient and the electromagnetic body force to the melt flow are significant. Marangoni convection affects the growth process adversely by making the melt flow downward in the region under the seed crystal. This downward flow reduces carbon flux into the seed and consequently lowers growth rate. The effects of free surface deformation and seed rotation, although positive, are not so significant compared with those of free surface tension gradient and the electromagnetic body force. Due to the small size of the melt the contribution of buoyancy is also small. (C) 2017 Elsevier B.V. All rights reserved.

引用

页码：75 / 88

页数：14

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