Ab initio cluster calculations of the chemisorption of hydrogen on the Si(111)√3x√3R30°-B surface

被引:16
作者
Wang, SW [1 ]
Radny, MW [1 ]
Smith, PV [1 ]
机构
[1] Univ Newcastle, Dept Phys, Callaghan, NSW 2308, Australia
关键词
ab initio quantum chemical methods; boron; chemisorption; hydrogen; silicon; surface chemical interaction;
D O I
10.1016/S0039-6028(97)00596-7
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
First principles all-electron Hartree-Fock and density functional theory cluster calculations have been performed to investigate the chemisorption of atomic hydrogen on the Si(111)root 3 x root 3R30 degrees-B surface. Both the equilibrium geometries corresponding to n hydrogen atoms (1 less than or equal to n less than or equal to 5) chemisorbing on the B-S-5 and B-T-4 reconstructed structures, and the desorption energies for a silicon or boron adatom bonded to x hydrogen atoms (0 less than or equal to x less than or equal to 3), have been obtained. As successively more hydrogen is chemisorbed, a silicon or boron adatom is found to move from its original threefold site to an adjacent bridge Site, and then to a neighbouring on-top site. It is also found that boron will most likely occupy a subsurface substitutional S-5 site at low hydrogen Coverages (less than or equal to 0.67 ML), but appear as an adatom at an on-top site directly above one of the first-layer silicon atoms for hydrogen exposures higher than 0.67 ML. This boron segregation at high hydrogen exposures prevents the formation of SiH2 and SiH3 complexes and leads to the prediction that only SiH and BH2 will be observed on an Si(111):B hydrogenated surface. It also provides an explanation for the lack of Si surface etching at high hydrogen exposure. All of these results are in good agreement with the available experimental data on hydrogenated B/Si(111) surfaces. (C) 1997 Elsevier Science B.V.
引用
收藏
页码:235 / 249
页数:15
相关论文
共 56 条
[1]   ADSORPTION OF BORON ON SI(111) - PHYSICS, CHEMISTRY, AND ATOMIC-SCALE ELECTRONIC DEVICES [J].
AVOURIS, P ;
LYO, IW ;
BOZSO, F ;
KAXIRAS, E .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (04) :3405-3411
[2]   EVIDENCE FOR A 2D-METALLIC STATE OF THE CLEAN 7 BY 7 SI(111)SURFACE [J].
BACKES, U ;
IBACH, H .
SOLID STATE COMMUNICATIONS, 1981, 40 (05) :575-577
[3]   DENSITY-FUNCTIONAL THERMOCHEMISTRY .3. THE ROLE OF EXACT EXCHANGE [J].
BECKE, AD .
JOURNAL OF CHEMICAL PHYSICS, 1993, 98 (07) :5648-5652
[4]   SURFACE DOPING AND STABILIZATION OF SI(111) WITH BORON [J].
BEDROSSIAN, P ;
MEADE, RD ;
MORTENSEN, K ;
CHEN, DM ;
GOLOVCHENKO, JA ;
VANDERBILT, D .
PHYSICAL REVIEW LETTERS, 1989, 63 (12) :1257-1260
[5]   ADATOM REGISTRY ON SI(111)-(SQUARE-ROOT-3XSQUARE-ROOT-3)R 30-DEGREES-B [J].
BEDROSSIAN, P ;
MORTENSEN, K ;
CHEN, DM ;
GOLOVCHENKO, JA .
PHYSICAL REVIEW B, 1990, 41 (11) :7545-7548
[6]   SCANNING-TUNNELING-MICROSCOPY OF THE INTERACTION OF HYDROGEN WITH SILICON SURFACES [J].
BOLAND, JJ .
ADVANCES IN PHYSICS, 1993, 42 (02) :129-171
[7]   THERMAL AND PHOTOCHEMICAL OXIDATION OF SI(111) - DOPING EFFECT AND THE REACTION-MECHANISM [J].
BOZSO, F ;
AVOURIS, P .
PHYSICAL REVIEW B, 1991, 44 (16) :9129-9132
[8]   INHIBITION OF ATOMIC-HYDROGEN ETCHING OF SI(111) BY BORON DOPING [J].
CHEN, PJ ;
COLAIANNI, ML ;
YATES, JT .
JOURNAL OF APPLIED PHYSICS, 1991, 70 (06) :2954-2957
[9]   THE THERMAL-DISSOCIATION OF DECABORANE ON SI(111)-(7X7) AND DOPING EFFECTS IN THE NEAR-SURFACE REGION [J].
CHEN, PJ ;
COLAIANNI, ML ;
YATES, JT .
JOURNAL OF APPLIED PHYSICS, 1992, 72 (07) :3155-3160
[10]   SELF-CONSISTENT MOLECULAR-ORBITAL METHODS .9. EXTENDED GAUSSIAN-TYPE BASIS FOR MOLECULAR-ORBITAL STUDIES OF ORGANIC MOLECULES [J].
DITCHFIELD, R ;
HEHRE, WJ ;
POPLE, JA .
JOURNAL OF CHEMICAL PHYSICS, 1971, 54 (02) :724-+