Influences of the Structure Parameters on Sensitivity and Brownian Noise of the Disk Resonator Gyroscope

This paper presents a comprehensive investigation of the influences of the structure parameters on the sensitivity and Brownian noise of the disk resonator gyroscope (DRG). The mechanical sensitivity, transducer sensitivity, Brownian displacement, and Brownian noise floor of the DRG with varying structural parameters (including ring number, resonator diameter, structure height, and anchor size) are calculated based on the finite-element method (COMSOL Multiphysics). Each parameter is studied independently. Meanwhile, useful comparison between the DRG and the ring vibratory gyroscope is made, which indicates that the DRG has great advantages over the transducer sensitivity and Brownian noise. Last but not least, a multi-objective optimization method is used to design the ring thickness distribution of the DRG and an instructive ring thickness distribution designing rule is obtained. The preceding study can give an explicit guideline for designing all kinds of DRG and may also provide useful information for designing other micro gyroscopes. The multi-objective optimization method could be expanded to include other objectives, constraints, or variables relevant to all kinds of gyroscopes or other microelectromechanical systems devices.