Effect of aging under ambient conditions on the optical properties of Al-doped ZnO thin films deposited by direct current sputtering

被引：0

作者：

Barhoumi, A. ^{[1
]}

Leroy, G. ^{[2
]}

Duponchel, B. ^{[3
]}

Gest, J. ^{[2
]}

Guermazi, S. ^{[1
]}

机构：

[1] Univ Sfax, Unite Rech Phys Mat Isolants & Semiisolants PMISI, Sfax 3018, Tunisia

[2] ULCO, UDSMM, F-62228 Calais, France

[3] ULCO, UDSMM, F-59140 Dunkerque, France

来源：

EUROPEAN PHYSICAL JOURNAL PLUS | 2017年 / 132卷 / 01期

关键词：

PULSED-LASER DEPOSITION; ELECTRICAL-PROPERTIES; TRANSPARENT; TEMPERATURE; GROWTH;

D O I：

10.1140/epjp/i2017-11285-3

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Transparent and conductive Al-doped ZnO (AZO) thin films were deposited on a glass substrate by direct current sputtering. In a previous study, we noted the influence of time on structural and electrical characteristics of films. In the present paper, the effect of a two-year aging under ambient conditions on the optical properties was investigated. A global improvement of the optical properties of AZO thin films was observed. The optical transmittance spectra revealed a high transmittance more than 90% in the Vis-NIR regions and a high absorption in the ultraviolet range. It is assumed that the crystallinity segregation leads to the decrease of optical scattering. The results from the optical measurements showed a reorganization of the structure leading to the degradation of the structural homogeneity. Nevertheless, the evolution of the figure of merit shows that Al-doped ZnO is a good candidate for the manufacturing and the commercialization of transparent conducting oxide devices.

引用

页数：10

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