Preparation and characterization of AlCrTaTiZr multi-element nitride coatings

被引：333

作者：

Lai, Chia-Han

Lin, Su-Jien ^{[1
]}

Yeh, Jien-Wei

Chang, Shou-Yi

机构：

[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan

[2] Natl Chung Hsing Univ, Dept Mat Engn, Taichung 402, Taiwan

来源：

SURFACE & COATINGS TECHNOLOGY | 2006年 / 201卷 / 06期

关键词：

high entropy alloy; multi-element; nitride coatings; magnetron sputtering; hardness;

D O I：

10.1016/j.surfcoat.2006.06.048

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Multi-element nitride films of AlCrTaTiZr high-entropy alloy have been prepared in this study by reactive radio-frequency magnetron sputtering. The influences of nitrogen flow ratio on the chemical composition, microstructure and mechanical properties of the deposited nitride films have been investigated. The AlCrTaTiZr alloy film exhibited an amorphous structure, while a simple face-center-cubic solid-solution structure was observed in the nitride films prepared under different nitrogen flow ratios. The multi-element AlCrTaTiZr nitride films exhibited much improved mechanical properties as compared with conventional nitride hard coatings of transition metals. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：3275 / 3280

页数：6

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