The Design and Characteristics of a 630-mm Phase-Shifting Interferometer

被引：17

作者：

Silin, D. E. ^{[1
]}

Kozhevatov, I. E. ^{[1
]}

Kulikova, E. H. ^{[1
]}

Pigasin, A. V. ^{[1
]}

Speransky, S. B. ^{[1
]}

Bel'kov, S. A. ^{[2
]}

Derkach, I. N. ^{[2
]}

Lobachev, D. I. ^{[2
]}

Chernov, I. E. ^{[2
]}

机构：

[1] Russian Acad Sci, Inst Appl Phys, Fed Res Ctr, Nizhnii Novgorod 603950, Russia

[2] All Russia Res Inst Expt Phys, Russian Fed Nucl Ctr, Sarov 607188, Nizhny Novgorod, Russia

来源：

INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 2018年 / 61卷 / 03期

关键词：

Laser optics;

D O I：

10.1134/S0020441218020215

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A large-aperture Fizeau interferometer has been developed for measuring the characteristics of optical elements with flat surfaces. The interferometer has two fields of view with dimensions of 630 and 100 mm and with transverse resolutions of 0.63 and 0.1 mm/pixel, respectively. Due to the calibration of the reference plates, the absolute measurement accuracy of the interferometer is lambda/1000 RMS (lambda = 632.8 nm) on a 630-mm field of view.

引用

页码：393 / 399

页数：7

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