Investigation of radiation-induced surface temperature of thick polymer layers under influence of synchrotron radiation

被引：1

作者：

Nazmov, VP ^{[1
]}

Pindyurin, VF ^{[1
]}

机构：

[1] Russian Acad Sci, Budker Inst Nucl Phys, Siberian Branch, Novosibirsk 630090, Russia

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2000年 / 170卷 / 3-4期

关键词：

thermoresistor; synchrotron radiation; polymer;

D O I：

10.1016/S0168-583X(00)00248-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Radiation-induced heating of thick polymer layers under synchrotron radiation (SR) in a process of formation of microstructures with high aspect ratio has been investigated with the use of film thermoresistors. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：369 / 374

页数：6

共 7 条

[1] X-RAY-LITHOGRAPHY AT THE VEPP-3 STORAGE RING [J].

ARTAMONOVA, LD ;

GENTSELEV, AN ;

DEIS, GA ;

KRASNOPEROVA, AA ;

MIKHALYOV, EV ;

PROKOPENKO, VS ;

KULIPANOV, GN ;

MEZENTSEVA, LA ;

PINDYURIN, VF .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1992, 63 (01) :764-766

[2]

DULNEV GN, 1968, HEAT EXCHANGE RADIOE

[3] PROGRESS IN DEEP-ETCH SYNCHROTRON RADIATION LITHOGRAPHY [J].

EHRFELD, W ;

BLEY, P ;

GOTZ, F ;

MOHR, J ;

MUNCHMEYER, D ;

SCHELB, W ;

BAVING, HJ ;

BEETS, D .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (01) :178-182

[4]

KIKOIN JK, 1976, TABLES PHYSICAL VALU

[5]

Korn G. A., 1968, Mathematical Handbook for Scientists and Engineers

[6]

Manohara HM, 1996, P SOC PHOTO-OPT INS, V2880, P183, DOI 10.1117/12.250950

[7]

VLADIMIRSKY Y, 1994, P SOC PHOTO-OPT INS, V2640, P184

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