Investigation of micro solid immersion lens mounting systems

被引：9
|
作者：
Lang, Matthew
Milster, Tom D.
Minamitan, Takahisa
Borek, Gregg
机构：
[1] Univ Arizona, Coll Opt Sci, Tucson, AZ 85721 USA
[2] MEMS Opt Inc, Huntsville, AL 35806 USA
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2007年 / 46卷 / 6B期
关键词：
solid immersion lens; lithography; gallium phosphide; micro-optics;
D O I：
10.1143/JJAP.46.3737
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Concept, design and analysis of several solid immersion lens (SIL) mounting systems utilizing high-index refractive micro SILs are described. This paper proposes several designs for wafer-scale SIL assemblies capable of a numerical aperture of 2.2.
引用
收藏
页码：3737 / 3740
页数：4
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