A thermally tunable, silicon-based optical filter

被引：33
|
作者：
Hohlfeld, D [1 ]
Epmeier, M [1 ]
Zappe, H [1 ]
机构：
[1] Univ Freiburg, Lab Microopt, Inst Microsyst Technol, D-79110 Freiburg, Germany
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2003年 / 103卷 / 1-2期
关键词：
tunable optical filters; thermo-optic effect; micromachined suspension; wavelength-division multiplexing;
D O I：
10.1016/S0924-4247(02)00320-5
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A novel silicon MEMS-based concept for tunable optical filters used in wavelength-division multiplexing (WDM) systems is presented. Such a filter is essential for monitoring and reconfiguring optical networks. The device is based on a Fabry-Perot interferometer employing a silicon cavity and silicon-based dielectric Bragg mirrors and is fabricated as a free-standing membrane. Wavelength tuning is achieved through thermal modulation of the resonator's optical thickness. Measurement of optical filter performance and tunability as well as numerical simulation results of its steady-state and transient thermal behavior are presented. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：93 / 99
页数：7
相关论文
共 50 条
  • [41] A porous silicon-based optical interferometric biosensor
    Lin, VSY
    Motesharei, K
    Dancil, KPS
    Sailor, MJ
    Ghadiri, MR
    SCIENCE, 1997, 278 (5339) : 840 - 843
  • [42] Nongenetic optical neuromodulation with silicon-based materials
    Jiang, Yuanwen
    Parameswaran, Ramya
    Li, Xiaojian
    Carvalho-de-Souza, Joao L.
    Gao, Xiang
    Meng, Lingyuan
    Bezanilla, Francisco
    Shepherd, Gordon M. G.
    Tian, Bozhi
    NATURE PROTOCOLS, 2019, 14 (05) : 1339 - 1376
  • [43] Proposal of a thermally-tunable silicon-on-insulator microring resonator filter
    Dai, Daoxin
    Yang, Liu
    AOE 2007: ASIA OPTICAL FIBER COMMUNICATION & OPTOELECTRONIC EXPOSITION & CONFERENCE, CONFERENCE PROCEEDINGS, 2008, : 582 - 583
  • [44] Bandwidth and wavelength tunable optical passband filter based on silicon multiple microring resonators
    Dai, Tingge
    Shen, Ao
    Wang, Gencheng
    Wang, Yuehai
    Li, Yubo
    Jiang, Xiaoqing
    Yang, Jianyi
    OPTICS LETTERS, 2016, 41 (20) : 4807 - 4810
  • [45] Bandwidth-tunable optical passband filter based on graphene-silicon waveguide
    Li, Shiqi
    Chen, Weiwei
    Wang, Pengjun
    Fu, Qiang
    Zhang, Jie
    Zhang, Bohao
    Dai, Tingge
    Wang, Yuehai
    Yang, Jianyi
    OPTICS COMMUNICATIONS, 2018, 426 : 206 - 211
  • [46] Tunable multichannel optical filter based on silicon photonic band gap materials actuation
    Yi, Y
    Bermel, P
    Wada, K
    Duan, XM
    Joannopoulos, JD
    Kimerling, LC
    APPLIED PHYSICS LETTERS, 2002, 81 (22) : 4112 - 4114
  • [47] Electrically Driven and Thermally Tunable Integrated Optical Isolators for Silicon Photonics
    Huang, Duanni
    Pintus, Paolo
    Zhang, Chong
    Shoji, Yuya
    Mizumoto, Tetsuya
    Bowers, John E.
    IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2016, 22 (06) : 271 - 278
  • [48] Analysis and Stability of a Silicon-Based Thermally Actuated MEMS Viscosity Sensor
    Puchades, Ivan
    Fuller, Lynn F.
    Lyshevski, Sergey E.
    2017 IEEE 37TH INTERNATIONAL CONFERENCE ON ELECTRONICS AND NANOTECHNOLOGY (ELNANO), 2017, : 75 - 78
  • [49] Widely Bandwidth-Tunable Broadband Optical Filter on Silicon
    St-Yves, Jonathan
    Bahrami, Hadi
    Larochelle, Sophie
    Shi, Wei
    2015 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC), 2015,
  • [50] Study on transmission characteristics of silicon-based microstrip bandpass filter
    Peng, Yufeng
    Zhang, Shuli
    Li, Yaohui
    Zhao, Yue
    Lin, Sihong
    EQUIPMENT MANUFACTURING TECHNOLOGY AND AUTOMATION, PTS 1-3, 2011, 317-319 : 1187 - +
12345