Structural Engineering for High Sensitivity, Ultrathin Pressure Sensors Based on Wrinkled Graphene and Anodic Aluminum Oxide Membrane

被引:116
作者
Chen, Wenjun [1 ,2 ]
Gui, Xuchun [1 ,2 ]
Liang, Binghao [1 ,2 ]
Yang, Rongliang [1 ,2 ]
Zheng, Yongjia [1 ,2 ]
Zhao, Chengchun [1 ,2 ]
Li, Xinming [4 ]
Zhu, Hai [1 ,3 ]
Tang, Zikang [1 ,2 ,5 ]
机构
[1] Sun Yat Sen Univ, State Key Lab Optoelect Mat & Technol, Guangzhou 510275, Guangdong, Peoples R China
[2] Sun Yat Sen Univ, Sch Elect & Informat Technol, Guangzhou 510275, Guangdong, Peoples R China
[3] Sun Yat Sen Univ, Sch Phys, Guangzhou 510275, Guangdong, Peoples R China
[4] Chinese Univ Hong Kong, Dept Elect Engn, Hong Kong, Hong Kong, Peoples R China
[5] Univ Macau, Inst Appl Phys & Mat Engn, Ave Univ, Taipa 999078, Macau, Peoples R China
关键词
graphene; pressure sensor; wrinkled structures; anodic aluminum oxide; flexible electronics; STRAIN SENSORS; WEARABLE ELECTRONICS; ARRAY; DESIGN; NANOWIRES; SKIN; TRANSPARENT; COMPOSITE; MATRIX; RUBBER;
D O I
10.1021/acsami.7b05515
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Nature-motivated pressure sensors have been greatly important components integrated into flexible electronics and applied in artificial intelligence. Here, we report a high sensitivity, ultrathin, and transparent pressure sensor based on wrinkled graphene prepared by a facile liquid-phase shrink method. Two pieces of wrinkled graphene are face to face assembled into a pressure sensor, in which a porous anodic aluminum oxide (AAO) membrane with the thickness of only 200 nm was used to insulate the two layers of graphene. The pressure sensor exhibits ultrahigh operating sensitivity (6.92 kPa(-1)), resulting from the insulation in its inactive state and conduction under compression. Formation of current pathways is attributed to the contact of graphene wrinkles through the pores of AAO membrane. In addition, the pressure Sensor is also an on/off and energy saving device, due to the complete isolation between the two graphene layers when the sensor is not subjected to any pressure. We believe that our high-performance pressure sensor is an ideal candidate for integration in flexible electronics, but also paves the way for other 2D materials to be involved in the fabrication of pressure sensors.
引用
收藏
页码:24111 / 24117
页数:7
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