Revisiting the Constrained Blister Test to Measure Thin Film Adhesion

被引:14
|
作者
Zhu, Tingting [1 ]
Li, Guangxu [1 ,2 ]
Muftu, Sinan [1 ]
Wan, Kai-tak [1 ]
机构
[1] Northeastern Univ, Mech & Ind Engn, Boston, MA 02115 USA
[2] Texas Instruments Inc, Dallas, TX USA
来源
JOURNAL OF APPLIED MECHANICS-TRANSACTIONS OF THE ASME | 2017年 / 84卷 / 07期
基金
美国国家科学基金会;
关键词
membrane; adhesion; delamination; constrained blister; pull-off; ENERGY RELEASE RATE; FRACTURE-MECHANICS; CONTACT; MEMBRANE;
D O I
10.1115/1.4036776
中图分类号
O3 [力学];
学科分类号
08 ; 0801 ;
摘要
A thin film is clamped at the periphery to form a circular freestanding diaphragm before a uniform pressure, p, is applied to inflate it into a blister. The bulging membrane adheres to a rigid constraining plate with height, w(0), from the nondeformed membrane. Increasing pressure expands the contact circle of radius, c. Depressurization causes shrinkage of the contact and "pull-off" or spontaneous detachment from the plate. Simultaneous measurement of (p, w(0), c) allows one to determine the adhesion energy, c. A solid mechanics model is constructed based on small strain and linear elasticity, which shows a characteristic loading-unloading hysteresis. The results are consistent with a large deformation model in the literature.
引用
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页数:5
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