Picogram material dosing of microstructures

被引:9
作者
Bedair, Sarah S. [1 ]
Fedder, Gary K. [2 ,3 ]
机构
[1] USA, Res Lab, Adelphi, MD 20783 USA
[2] Carnegie Mellon Univ, Dept Elect & Comp Engn, Pittsburgh, PA 15213 USA
[3] Carnegie Mellon Univ, Inst Robot, Pittsburgh, PA 15213 USA
关键词
EVAPORATION; MENISCUS; SESSILE; FLOW;
D O I
10.1063/1.3248305
中图分类号
O59 [应用物理学];
学科分类号
摘要
A solution delivery platform comprised of a suspended microcapillary connected to a microwell enables picogram solute deposition on suspended structures. Precision material placement in the capillary from a 100 pl drop inkjetted into the well is achieved without the destruction of the microstructure and adjacent submicron electrostatic gaps. This method scales to smaller structures without the need for drop miniaturization. The theory behind the solute transfer in the system is developed. Three regions in the drying process are observed and match with the model. The "accumulation" region builds solute concentration in the capillary. The "solidification" region initiates the solidification of solute starting at the free end of the capillary. The "termination" region is characterized by a rapid increase in the solidification due to an increase in the well concentration near the end of the drop lifetime. The accumulation time and solidification rate dependence on concentration compare well with the model. (C) 2009 American Institute of Physics. [doi: 10.1063/1.3248305]
引用
收藏
页数:7
相关论文
共 17 条
[1]   Polymer mass loading of CMOS/MEMS microslot cantilever for gravimetric sensing [J].
Bedair, Sarah S. ;
Fedder, Gary K. .
2007 IEEE SENSORS, VOLS 1-3, 2007, :1164-1167
[2]   CMOS MEMS oscillator for gas chemical detection [J].
Bedair, SS ;
Fedder, GK .
PROCEEDINGS OF THE IEEE SENSORS 2004, VOLS 1-3, 2004, :955-958
[3]  
BEDAIR SS, 2008, THESIS CARNEGIE MELL
[4]  
BEDAIR SS, 2005, INT C SOL STAT ACT T, V2, P2035
[5]   Rapid functionalization of cantilever array sensors by inkjet printing [J].
Bietsch, A ;
Zhang, JY ;
Hegner, M ;
Lang, HP ;
Gerber, C .
NANOTECHNOLOGY, 2004, 15 (08) :873-880
[6]   INVESTIGATION OF AN EVAPORATING EXTENDED MENISCUS BASED ON THE AUGMENTED YOUNG-LAPLACE EQUATION [J].
DASGUPTA, S ;
SCHONBERG, JA ;
WAYNER, PC .
JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME, 1993, 115 (01) :201-208
[7]   Capillary flow as the cause of ring stains from dried liquid drops [J].
Deegan, RD ;
Bakajin, O ;
Dupont, TF ;
Huber, G ;
Nagel, SR ;
Witten, TA .
NATURE, 1997, 389 (6653) :827-829
[8]   Simultaneous determination of toluene diffusion coefficient in air from thin tube evaporation and sessile drop evaporation on a solid surface [J].
Erbil, HY ;
Avci, Y .
LANGMUIR, 2002, 18 (13) :5113-5119
[9]   Laminated high-aspect-ratio microstructures in a conventional CMOS process [J].
Fedder, GK ;
Santhanam, S ;
Reed, ML ;
Eagle, SC ;
Guillou, DF ;
Lu, MSC ;
Carley, LR .
SENSORS AND ACTUATORS A-PHYSICAL, 1996, 57 (02) :103-110
[10]   Super-fine ink-jet printing: toward the minimal manufacturing system [J].
Murata, K ;
Matsumoto, J ;
Tezuka, A ;
Matsuba, Y ;
Yokoyama, H .
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2005, 12 (1-2) :2-7