The effect of substrate bias on the characteristics of CrN coatings deposited by DC-superimposed HiPIMS system

被引：4

作者：

Zuo, X. ^{[1
,2
]}

Xia, F. ^{[1
,2
,3
]}

Zhang, D. ^{[1
,2
]}

Ke, P. L. ^{[1
,2
]}

Wang, Q. M. ^{[3
]}

Wang, A. Y. ^{[1
,2
]}

机构：

[1] Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Key Lab Marine Mat & Related Technol, Ningbo 315201, Zhejiang, Peoples R China

[2] Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Zhejiang Key Lab Marine Mat & Protect Technol, Ningbo 315201, Zhejiang, Peoples R China

[3] Guangdong Univ Technol, Sch Electromech Engn, Guangzhou 510006, Guangdong, Peoples R China

来源：

INTERNATIONAL JOURNAL OF MODERN PHYSICS B | 2017年 / 31卷 / 16-19期

基金：

中国国家自然科学基金;

关键词：

HiPIMS; CrN coatings; substrate bias; microstructure; fracture toughness; CATHODIC ARC; VOLTAGE; FILMS;

D O I：

10.1142/S0217979217440325

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Chromium nitride coatings were prepared by reactive DC-superimposed high-power impulse magnetron sputtering (HiPIMS) system. The influence of substrate bias on the microstructure and mechanical properties of CrN coatings was investigated. XRD and cross-sectional SEM were utilized to characterize the film structures. Mechanical properties were characterized by nanoindentation and Vickers indentation test. The results revealed that the microstructure and mechanical properties of CrN coatings were affected by bias voltage. The CrN coatings exhibited dense and fine columnar grain structure with the hardness of about 18.7 GPa. The fracture toughness of CrN coatings was around 3.16 MPa . m(1/2). However, further increase of the bias voltage from -250 V to -300 V led to the degradation of coating properties.

引用

页数：5

共 50 条

[1] Effect of bias voltage on TiAlSiN nanocomposite coatings deposited by HiPIMS
Ma, Quansheng
Li, Liuhe
Xu, Ye
Gu, Jiabin
Wang, Lei
Xu, Yi
APPLIED SURFACE SCIENCE, 2017, 392 : 826 - 833
[2] Effect of substrate bias voltage on defect generation and their influence on corrosion and tribological properties of HIPIMS deposited CrN/NbN coatings
Biswas, Barnali
Purandare, Yashodhan
Khan, Imran
Hovsepian, Papken Eh
SURFACE & COATINGS TECHNOLOGY, 2018, 344 : 383 - 393
[3] Effect of substrate bias on properties of HiPIMS deposited vanadium nitride films
Hajihoseini, H.
Kateb, M.
Ingvarsson, S.
Gudmundsson, J. T.
THIN SOLID FILMS, 2018, 663 : 126 - 130
[4] Effect of substrate bias on microstructure and mechanical properties of WC-DLC coatings deposited by HiPIMS
Wang, Lei
Li, Liuhe
Kuang, Xiaocong
SURFACE & COATINGS TECHNOLOGY, 2018, 352 : 33 - 41
[5] Effect of substrate bias voltage on the properties of CrCN and CrN coatings deposited by cathodic arc evaporation
Warcholinski, B.
Gilewicz, A.
VACUUM, 2013, 90 : 145 - 150
[6] On the Effect of Aluminum on the Microstructure and Mechanical Properties of CrN Coatings deposited by HiPIMS
Rodrigues Guimaraes, Monica Costa
Noronha Marques de Castilho, Bruno Cesar
Cunha, Carlos
Correr, Wagner Rafael
Mordente, Paulo
Alvarez, Fernando
Pinto, Haroldo Cavalcanti
MATERIALS RESEARCH-IBERO-AMERICAN JOURNAL OF MATERIALS, 2018, 21 (03):
[7] Comparative study on protective properties of CrN coatings on the ABS substrate by DCMS and HiPIMS techniques
Zhang, Dong
Zuo, Xiao
Wang, Zhenyu
Li, Hao
Chen, Rende
Wang, Aiying
Ke, Peiling
SURFACE & COATINGS TECHNOLOGY, 2020, 394
[8] Effects of Synchronized Pulsed-bias on Microstructure and Properties of CrN Coatings Prepared by HiPIMS at Low Temperature
Gui Binhua
Zhou Hui
Zhang Tengfei
Ma Zhanji
Yang Lamaocao
Zhang Yanshuai
CHINA SURFACE ENGINEERING, 2022, 35 (03) : 226 - 234
[9] The influence of superimposed DC current on electrical and spectroscopic characteristics of HiPIMS discharge
Zuo, Xiao
Chen, Rende
Liu, Jingzhou
Ke, Peiling
Wang, Aiying
AIP ADVANCES, 2018, 8 (01):
[10] Influence of Substrate Negative Bias on Structure and Properties of TiN Coatings Prepared by Hybrid HIPIMS Method
Wang, Zhenyu
Zhang, Dong
Ke, Peiling
Liu, Xincai
Wang, Aiying
JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, 2015, 31 (01) : 37 - 42

← 1 2 3 4 5 →