共 12 条
[2]
DAMMANN H, 1970, OPTIK, V31, P95
[4]
FLUOROCARBON HIGH-DENSITY PLASMA .5. INFLUENCE OF ASPECT RATIO ON THE ETCH RATE OF SILICON DIOXIDE IN AN ELECTRON-CYCLOTRON-RESONANCE PLASMA
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1994, 12 (03)
:658-664
[5]
KIPFER P, 1994, P SOC PHOTO-OPT INS, V2169, P100, DOI 10.1117/12.190215
[8]
BINARY HIGH-FREQUENCY-CARRIER DIFFRACTIVE OPTICAL-ELEMENTS - ELECTROMAGNETIC THEORY
[J].
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION,
1994, 11 (03)
:1097-1109
[9]
SHANK SM, IN PRESS J VAC SCI B