Implementation of AFM tip-based nanoscratching process on single crystal copper: Study of material removal state

被引:21
|
作者
Yan, Yongda [1 ,2 ]
Wang, Jiqiang [2 ]
Geng, Yanquan [1 ,2 ]
Fang, Zhuo [2 ]
He, Yang [2 ]
机构
[1] Harbin Inst Technol, Minist Educ, Key Lab Microsyst & Microstruct Mfg, Harbin 150001, Heilongjiang, Peoples R China
[2] Harbin Inst Technol, Ctr Precis Engn, Harbin 150001, Heilongjiang, Peoples R China
基金
中国国家自然科学基金;
关键词
AFM; Tip-based machining; Normal load; Material removal state; FABRICATION; DEPTH;
D O I
10.1016/j.apsusc.2018.08.090
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The material removal state, which is closely related to machining quality, is an important factor in any machining process. During the machining using a non-rotational symmetric cutting tool, scratching direction manifests significant influence on the material removal state. In the present study, the relationship between material removal mode and scratching direction was investigated during the nanoscratching process on single crystal copper using an atomic force microscopy (AFM) tip. Considering the installation angle of the cantilever and the height of pile-up, a theoretical model was developed to relate machining depth with normal load for the machining of a single groove. Experimental results revealed that the theoretical normal load model was more suitable when materials were expelled in constant chip formation with small pile-ups. In addition, based on the scratching tests in different directions, the critical included cutting angle determined whether materials were expelled in chip formation or not. The height of pile-up was also influenced by the included cutting angle during the scratching in face-forward direction; however, during the machining in edge-forward direction, the distance between the cutting swept faces formed by the lateral and front edges determined the height of pile-up. Finally, an optimal machining direction is selected based on the quality of the machined grooves, which can be used in the potential application.
引用
收藏
页码:723 / 731
页数:9
相关论文
共 12 条
  • [1] Study of the formation mechanism of bundle structures using AFM tip-based nanoscratching approach
    Wang, Jiqiang
    Yan, Yongda
    Chang, Shunyu
    Wang, Tong
    Geng, Yanquan
    Gan, Yang
    TRIBOLOGY INTERNATIONAL, 2020, 142
  • [2] Modelling and experimental study of nanoscratching process on PMMA thin-film using AFM tip-based nanomachining approach
    Yan, Yongda
    Zhou, Erchao
    Geng, Yanquan
    He, Yang
    Zhao, Xuesen
    PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2018, 54 : 138 - 148
  • [3] Tip-based nanomanufacturing process of single crystal SiC: Ductile deformation mechanism and process optimization
    Meng, Binbin
    Yuan, Dandan
    Zheng, Jian
    Qiu, Pei
    Xu, Shaolin
    APPLIED SURFACE SCIENCE, 2020, 500
  • [4] Atomic simulations of tip-based nanomilling on single-crystal copper
    Yan, Yongda
    Li, Zihan
    Wang, Jiqiang
    Geng, Yanquan
    MATERIALS TODAY COMMUNICATIONS, 2022, 31
  • [5] Effect of sample materials on the AFM tip-based dynamic ploughing process
    Yan, Yongda
    Liu, Weitao
    Hu, Zhenjiang
    Zhao, Xuesen
    Yan, Jiucun
    ADVANCED MANUFACTURING TECHNOLOGY, PTS 1-3, 2011, 314-316 : 492 - +
  • [6] Modeling and experimental study of machining outcomes when conducting nanoscratching using dual-tip probe on single-crystal copper
    Geng, Yanquan
    Jia, Junshuai
    Li, Zihan
    Liu, Yu
    Wang, Jiqiang
    Yan, Yongda
    Gan, Yang
    INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES, 2021, 206 (206)
  • [7] Effect of material removal state on the selection of theoretical models when scratching single-crystal copper using the load modulation approach
    Yan, Yongda
    Wang, Yuzhang
    Wang, Jiqiang
    Geng, Yanquan
    PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART B-JOURNAL OF ENGINEERING MANUFACTURE, 2020, 234 (04) : 720 - 729
  • [8] Effect of scratching trajectory and feeding direction on formation of ripple structure on polycarbonate sheet using AFM tip-based nanomachining process
    Yan, Yongda
    Cui, Xing
    Geng, Yanquan
    He, Yang
    MICRO & NANO LETTERS, 2017, 12 (12): : 1011 - 1015
  • [9] Molecular dynamics study on the mechanism of AFM-based nanoscratching process with water-layer lubrication
    Ren, Jiaqi
    Zhao, Jinsheng
    Dong, Zeguang
    Liu, Pinkuan
    APPLIED SURFACE SCIENCE, 2015, 346 : 84 - 98
  • [10] Study of the minimum depth of material removal in nanoscale mechanical machining of single crystalline copper
    Zhu, Pengzhe
    Fang, Fengzhou
    COMPUTATIONAL MATERIALS SCIENCE, 2016, 118 : 192 - 202