Piezoelectric ultrasonic micromotor with 1.5 mm diameter

被引：86
作者：
Dong, SX [1 ]
Lim, SP
Lee, KH
Zhang, JD
Lim, LC
Uchino, K
机构：
[1] Penn State Univ, Int Ctr Transducers & Actuators, Inst Mat Res, University Pk, PA 16802 USA
[2] Virginia Tech, Dept Mat Sci & Engn, Blacksburg, VA 24061 USA
[3] Natl Univ Singapore, Fac Engn, Singapore 119260, Singapore
来源：
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2003年 / 50卷 / 04期
关键词：
D O I：
10.1109/TUFFC.2003.1197958
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
A piezoelectric ultrasonic micrometer has been developed using a lead zirconate titanate (PZT) ceramic/metal composite tube stator that was 1.5 mm in diameter and 7 mm in length. The micrometer was operated in its first bending vibration mode (similar to70 kHz), producing speeds from hundreds to over 2000 rpm in both rotational directions. The maximum torque-output was 45 muN-m, which is far superior to previous PZT thin film-based micrometers. This micrometer showed good reliability and stability for more than 300 hours of continued operation.
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收藏
页码：361 / 367
页数：7
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