Sensing CO2 in a chemically modified porous silicon film

被引：43
作者：
Rocchia, M
Garrone, E
Geobaldo, F
Boarino, L
Sailor, MJ
机构：
[1] Politecn Torino, Dept Mat Sci & Chem Engn, I-10128 Turin, Italy
[2] Ist Elettrotecnico Nazl Galileo Ferraris, Nanotechnol & Quantum Devices Lab, I-10135 Turin, Italy
[3] Univ Calif San Diego, Dept Biochem & Chem, La Jolla, CA 92093 USA
来源：
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2003年 / 197卷 / 02期
关键词：
D O I：
10.1002/pssa.200306526
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
An inexpensive and compact carbon dioxide sensor based on a porous silicon (PS) film modified with 3-amino-1-propanol has been demonstrated. The modifying reaction as well as the interaction of carbon dioxide with the PS amine-terminated surface has been investigated using Fourier Transform Infrared Spectroscopy. Optical reflectivity spectra of PS modified layers display shifts in the Fabry-Perot fringes upon adsorption of carbon dioxide. This shift scales with the CO2 concentration.
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收藏
页码：365 / 369
页数：5
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